Plasma combined with hexamethyldisilazane treatment to improve anti-vacuum pollution performance of antireflective coatings

Dong Xiang; Lü Haibing; Yan Hongwei; Li Bo; Xiang Xia; Jiang Xiaodong

doi:10.11884/HPLPB202133.200341

Volume 33 Issue 7

Jul. 2021

Turn off MathJax

Article Contents

Article Navigation > High Power Laser and Particle Beams > 2021 > 33(7): 071002

Dong Xiang, Lü Haibing, Yan Hongwei, et al. Plasma combined with hexamethyldisilazane treatment to improve anti-vacuum pollution performance of antireflective coatings[J]. High Power Laser and Particle Beams, 2021, 33: 071002. doi: 10.11884/HPLPB202133.200341

Citation:

Dong Xiang, Lü Haibing, Yan Hongwei, et al. Plasma combined with hexamethyldisilazane treatment to improve anti-vacuum pollution performance of antireflective coatings[J]. High Power Laser and Particle Beams, 2021, 33: 071002. doi: 10.11884/HPLPB202133.200341

Citation:

Dong Xiang, Lü Haibing, Yan Hongwei, et al. Plasma combined with hexamethyldisilazane treatment to improve anti-vacuum pollution performance of antireflective coatings[J]. High Power Laser and Particle Beams, 2021, 33: 071002. doi: 10.11884/HPLPB202133.200341

PDF( 1082 KB)

Plasma combined with hexamethyldisilazane treatment to improve anti-vacuum pollution performance of antireflective coatings

doi: 10.11884/HPLPB202133.200341

Dong Xiang^{1, 2
,},
Lü Haibing²,
Yan Hongwei²,
Li Bo¹,
Xiang Xia^{1
,
,},
Jiang Xiaodong²

1.
School of Physics, University of Electronic Science and Technology of China, Chengdu 610054, China
2.
Laser Fusion Research Center, CAEP, P. O. Box 919-988, Mianyang 621900, China

Received Date: 2020-12-17
Rev Recd Date: 2021-05-01

Available Online: 2021-05-28

Publish Date: 2021-07-15

Abstract

Abstract

The SiO₂ antireflective (AR) coating was prepared by sol-gel method and then modified by plasma combined with hexamethyldisilazane (HMDS). The effects of treatment on the surface morphology, microstructure, optical properties, and laser induced damage performance are investigated to obtain the SiO₂ antireflective coating with good resistance to vacuum organic contaminants. The results show that the antireflection coating shrinks, the roughness decreases and the content of polar hydroxyl group decreases after plasma combined with HMDS surface modification. Plasma and HMDS surface treatment optimizes the structure and optical properties of the film. The hydrophobic capability of the film and the resistance performance to contaminants under vacuum conditions are significantly enhanced without bad effect on the high threshold of sol-gel silica antireflection coating.
- antireflective coating,
- plasma treatment,
- hexamethyldisilazane,
- resistance to vacuum organic contaminants

FullText(HTML)

References(20)

References

[1]	吕百达. 强激光传输变换和光束控制研究的进展[J]. 红外与激光工程, 2000, 29(1):40-45. (Lü Baida. Developments in the propagation, transformation and beam control of high-power lasers[J]. Infrared and Laser Engineering, 2000, 29(1): 40-45 doi: 10.3969/j.issn.1007-2276.2000.01.011
[2]	李珂, 刘强, 李永平. 衍射光学元件表面反射对高功率激光系统的影响[J]. 中国激光, 2009, 36(6):1371-1377. (Li Ke, Liu Qiang, Li Yongping. Influence of reflection of diffractive optical elements on high-power laser system[J]. Chinese Journal of Lasers, 2009, 36(6): 1371-1377 doi: 10.3788/CJL20093606.1371
[3]	熊华山. 溶胶—凝胶法制备SiO₂增透膜的研究[D]. 成都: 四川大学, 2004. Xiong Huashan. Study on the SiO₂ antireflective coatings prepared from Sol-Gel process[D]. Chengdu: Sichuan University, 2004
[4]	晏良宏, 吕海兵, 严鸿维, 等. 二氧化硅增透膜微观结构与激光损伤阈值的调控[J]. 强激光与粒子束, 2012, 24(7):1745-1748. (Yan Lianghong, Lü Haibing, Yan Hongwei, et al. Control of microstructure and laser induced damage threshold of antireflective silica films[J]. High Power Laser and Particle Beams, 2012, 24(7): 1745-1748 doi: 10.3788/HPLPB20122407.1745
[5]	Belleville P F, Floch H G. Ammonia hardening of porous silica antireflective coatings[C]//Proc of SPIE 2288, Sol-Gel Optics III. San Diego: SPIE, 1994: 25-32.
[6]	沈军, 刘源, 李晓光. 溶胶-凝胶SiO₂减反膜的表面修饰和抗污染特性[J]. 硅酸盐学报, 2010, 38(11):2054-2058. (Shen Jun, Liu Yuan, Li Xiaoguang. Surface modification and contamination resistance of sol-gel SiO₂ derived antireflective coatings[J]. Journal of the Chinese Ceramic Society, 2010, 38(11): 2054-2058
[7]	赵松楠, 吕海兵, 晏良宏, 等. 掺氟SiO₂增透膜真空环境抗污染能力[J]. 强激光与粒子束, 2010, 22(5):1065-1068. (Zhao Songnan, Lü Haibing, Yan Lianghong, et al. Contamination-resistant capability of sol-gel fluorin-doped SiO₂ antireflective coating in vaccum[J]. High Power Laser and Particle Beams, 2010, 22(5): 1065-1068 doi: 10.3788/HPLPB20102205.1065
[8]	韩静香, 佘利娟, 翟立新, 等. 纳米二氧化硅的制备及表面修饰的研究进展[J]. 材料导报, 2010, 24(s1):6-8. (Han Jingxiang, She Lijuan, Zhai Lixin, et al. Research progress in preparation and surface modification of Nano-SiO₂[J]. Materials Review, 2010, 24(s1): 6-8
[9]	方志, 罗毅, 邱毓昌, 等. 空气中大气压下低温等离子体对聚四氟乙烯进行表面改性的研究[J]. 真空科学与技术学报, 2003, 23(6):408-412. (Fang Zhi, Luo Yi, Qiu Yuchang, et al. Surface modification of polytetrafluoroethylene with atmospheric pressure plasma in air[J]. Vacuum Science and Technology, 2003, 23(6): 408-412 doi: 10.3969/j.issn.1672-7126.2003.06.009
[10]	方志, 蔡玲玲. 空气中均匀介质阻挡放电功率密度对聚四氟乙烯表面改性的影响[J]. 高电压技术, 2011, 37(6):1459-1464. (Fang Zhi, Cai Lingling. Effects of power density on surface modification of polytetrafluorethylene by using a homogeneous dielectric barrier discharge at atmospheric air[J]. High Voltage Engineering, 2011, 37(6): 1459-1464
[11]	牛家嵘, 顾振亚. 利用低温空气等离子体改善聚酯和聚乙烯薄膜表面亲水性的研究[J]. 天津工业大学学报, 2004, 23(4):40-43, 47. (Niu Jiarong, Gu Zhenya. Research on surface hydrophilic modification of PET and PE films by low temperature air plasma[J]. Journal of Tianjin Polytechnic University, 2004, 23(4): 40-43, 47 doi: 10.3969/j.issn.1671-024X.2004.04.011
[12]	伍林, 曹淑超, 易德莲, 等. 六甲基二硅胺烷对纳米二氧化硅表面改性的研究[J]. 中国粉体技术, 2004, 10(s1):116-118. (Wu Lin, Cao Shuchao, Yi Delian, et al. Surface modification of silicon dioxide with hexamethyldisilazane[J]. China Powder Science and Technology, 2004, 10(s1): 116-118
[13]	熊怀, 李海元, 唐永兴. 疏水性SiO₂基减反膜稳定性研究[J]. 中国激光, 2010, 37(12):3116-3120. (Xiong Huai, Li Haiyuan, Tang Yongxing. Study on stability of SiO₂-based moisture-resistant antireflective coatings[J]. Chinese Journal of Lasers, 2010, 37(12): 3116-3120 doi: 10.3788/CJL20103712.3116
[14]	赵松楠, 晏良宏, 吕海兵, 等. 不同后处理方法对溶胶-凝胶SiO₂膜层抗污染能力的影响[J]. 强激光与粒子束, 2009, 21(2):240-244. (Zhao Songnan, Yan Lianghong, Lü Haibing, et al. Effects of different treatments on contamination resistant capability of sol-gel SiO₂ film[J]. High Power Laser and Particle Beams, 2009, 21(2): 240-244
[15]	刘海勇, 高鹏, 张晓卫, 等. 提高复杂真空环境下光学镜片的使用寿命[J]. 真空, 2015, 52(3):67-70. (Liu Haiyong, Gao Peng, Zhang Xiaowei, et al. Improvement of the service life of optical lens in complex vacuum environment[J]. Vacuum, 2015, 52(3): 67-70
[16]	赵慧月, 王晓栋, 冯建斌, 等. NH₃/HTMS气相法改性SiO₂增透膜的耐环境稳定性[J]. 无机材料学报, 2018, 33(11):1219-1224. (Zhao Huiyue, Wang Xiaodong, Feng Jianbin, et al. Environmental stable SiO₂ antireflective coating modified via NH₃/HTMS vapor phase treatment[J]. Journal of Inorganic Materials, 2018, 33(11): 1219-1224 doi: 10.15541/jim20180033
[17]	郭袁俊, 祖小涛, 蒋晓东, 等. 氨处理对溶胶凝胶增透膜激光损伤阈值的影响[J]. 光电工程, 2008, 35(7):126-129. (Guo Yuanjun, Zu Xiaotao, Jiang Xiaodong, et al. Effect of ammonia treatment on laser-induced damage threshold of sol-gel silica films[J]. Opto-Electronic Engineering, 2008, 35(7): 126-129 doi: 10.3969/j.issn.1003-501X.2008.07.025
[18]	张国柱, 杜海文, 刘丽琴. 等离子清洗技术[J]. 机电元件, 2001, 21(4):31-34. (Zhang Guozhu, Du Haiwen, Liu Liqin. Plasma cleaning technology[J]. Electromechanical Components, 2001, 21(4): 31-34 doi: 10.3969/j.issn.1000-6133.2001.04.008
[19]	王承遇, 史非, 任春生, 等. 大气压氧等离子体净化溶胶-凝胶TiO₂膜的研究(英文)[J]. 稀有金属材料与工程, 2012, 41(s3):326-330. (Wang Chengyu, Shi Fei, Ren Chunsheng, et al. Investigation of Sol-Gel TiO₂ films after atmospheric pressure Oxygen plasma cleaning[J]. Rare Metal Materials and Engineering, 2012, 41(s3): 326-330
[20]	关凯书, 姜秋鹏, 尹衍升. TiO₂/SiO₂/CeO₂复合纳米薄膜超亲水性能的研究[J]. 中国稀土学报, 2003, 21(3):291-294. (Guan Kaishu, Jiang Qiupeng, Yin Yansheng. Super-hydrophilicity of TiO₂/SiO₂/CeO₂ composite thin films[J]. Journal of the Chinese Rare Earth Society, 2003, 21(3): 291-294 doi: 10.3321/j.issn:1000-4343.2003.03.010