Vacuum performance of Ti-Zr-V getter films deposited on narrow tubes

Zhu Bangle; Fan Le; Hong Yuanzhi; Wang Sihui; Wei Wei; Wang Yigang; Fang Jianwei; Wang Yong

doi:10.11884/HPLPB202234.210478

Volume 34 Issue 6

Apr. 2022

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Zhu Bangle, Fan Le, Hong Yuanzhi, et al. Vacuum performance of Ti-Zr-V getter films deposited on narrow tubes[J]. High Power Laser and Particle Beams, 2022, 34: 064005. doi: 10.11884/HPLPB202234.210478

Citation:

Zhu Bangle, Fan Le, Hong Yuanzhi, et al. Vacuum performance of Ti-Zr-V getter films deposited on narrow tubes[J]. High Power Laser and Particle Beams, 2022, 34: 064005. doi: 10.11884/HPLPB202234.210478

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Vacuum performance of Ti-Zr-V getter films deposited on narrow tubes

doi: 10.11884/HPLPB202234.210478

National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230026, China

Received Date: 2021-11-09
Accepted Date: 2022-03-10
Rev Recd Date: 2022-03-07

Available Online: 2022-03-15

Publish Date: 2022-06-15

Abstract

Abstract

Non-evaporable getter films are widely used in particle accelerators. It has become an integral part of many particle accelerators. Ti-Zr-V films were deposited on Si substrates and straight and bent Ag-Cu tubes with an inner diameter of 22 mm by DC magnetron sputtering. After baked at 180 ℃ for 24 h, the ultimate vacuum of the coated tubes reached 9.2×10⁻¹⁰ Pa. The tubes with activated getter films maintained at 9×10⁻⁹ Pa after closing tubes and ion pump valve. The pumping speed and capacity of Ti-Zr-V films were measured by Test Particle Monte Carlo method. The results show that the best CO sticking probability reaches 0.3, with a pumping capacity of 1.2 monolayer.
- Ti-Zr-V getter films,
- ultimate vacuum,
- magnetron sputtering,
- non-evaporable getter film,
- pumping speed measurement

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References(15)

References

[1]	Sun Zhenbo, Shang Lei, Shang Fenglei, et al. Simulation study of longitudinal injection scheme for HALS with a higher harmonic cavity system[J]. Nuclear Science and Techniques, 2019, 30: 113. doi: 10.1007/s41365-019-0627-x
[2]	张波, 王勇, 尉伟, 等. 直流磁控溅射法在管道内壁镀TiZrV薄膜[J]. 强激光与粒子束, 2010, 22(9):2124-2128. (Zhang Bo, Wang Yong, Wei Wei, et al. Deposition of TiZrV coatings onto inner wall of stainless steel pipe by DC magnetron sputtering[J]. High Power Laser and Particle Beams, 2010, 22(9): 2124-2128 doi: 10.3788/HPLPB20102209.2124
[3]	Benvenuti C, Chiggiato P, Cicoira F, et al. Decreasing surface outgassing by thin film getter coatings[J]. Vacuum, 1998, 50(1/2): 57-63.
[4]	Benvenuti C, Chiggiato P, Cicoira F, et al. Nonevaporable getter films for ultrahigh vacuum applications[J]. Journal of Vacuum Science & Technology A, 1998, 16(1): 148-154.
[5]	Jimenez J M. LHC: the world's largest vacuum systems being operated at CERN[J]. Vacuum, 2009, 84(1): 2-7. doi: 10.1016/j.vacuum.2009.05.015
[6]	Al-Dmour E, Grabski M J. The vacuum system of MAX IV storage rings: installation and conditioning[C]//Proceedings of the 8th International Particle Accelerator Conference. Copenhagen, Denmark, 2017: 3468-3470.
[7]	Hahn M. Operational experience and relation to deposition process for NEG-coated chambers installed on the ESRF electron storage ring[J]. Vacuum, 2007, 81(6): 759-761. doi: 10.1016/j.vacuum.2005.11.051
[8]	Malyshev O B, Cox M P. Design modelling and measured performance of the vacuum system of the diamond light source storage ring[J]. Vacuum, 2012, 86(11): 1692-1696. doi: 10.1016/j.vacuum.2012.03.015
[9]	Li C C, Huang J L, Lin R J, et al. Activation characterization of non-evaporable Ti–Zr–V getter films by synchrotron radiation photoemission spectroscopy[J]. Thin Solid Films, 2009, 517(20): 5876-5880. doi: 10.1016/j.tsf.2007.06.102
[10]	Ge Xiaoqin, Wang Yigang, Shao Jieqiong, et al. Testing the activation temperature of non-evaporable Ti-Zr-Hf-V getter films by XPS[J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2020, 967: 163864. doi: 10.1016/j.nima.2020.163864
[11]	Prodromides A E, Scheuerlein C, Taborelli M. Lowering the activation temperature of TiZrV non-evaporable getter films[J]. Vacuum, 2001, 60(1/2): 35-41.
[12]	Benvenuti C, Chiggiato P, Mongelluzzo A, et al. Influence of the elemental composition and crystal structure on the vacuum properties of Ti-Zr-V nonevaporable getter films[J]. Journal of Vacuum Science & Technology A, 2001, 19(6): 2925-2930.
[13]	Malyshev O B, Valizadeh R, Colligon J S, et al. Influence of deposition pressure and pulsed dc sputtering on pumping properties of Ti–Zr–V nonevaporable getter films[J]. Journal of Vacuum Science & Technology A, 2009, 27(3): 521-530.
[14]	Malyshev O B, Middleman K J, Colligon J S, et al. Activation and measurement of nonevaporable getter films[J]. Journal of Vacuum Science & Technology A, 2009, 27(2): 321-327.
[15]	Malyshev O B, Middleman K J. Test particle monte-Carlo modelling of installations for NEG film pumping properties evaluation[J]. Vacuum, 2009, 83(6): 976-979. doi: 10.1016/j.vacuum.2008.11.008