Research on efficient fabrication of nanogratings by space shaping femtosecond laser

Zhao Changdong; Liu Yonggang; Wei Wenqing; Zhang Hang; Deng Hu; Liu Quancheng; Hu Jianbo; Shang Liping; Li Zhanfeng

doi:10.11884/HPLPB202436.240081

Volume 36 Issue 8

Jul. 2024

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Zhao Changdong, Liu Yonggang, Wei Wenqing, et al. Research on efficient fabrication of nanogratings by space shaping femtosecond laser[J]. High Power Laser and Particle Beams, 2024, 36: 081001. doi: 10.11884/HPLPB202436.240081

Citation:

Zhao Changdong, Liu Yonggang, Wei Wenqing, et al. Research on efficient fabrication of nanogratings by space shaping femtosecond laser[J]. High Power Laser and Particle Beams, 2024, 36: 081001. doi: 10.11884/HPLPB202436.240081

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Research on efficient fabrication of nanogratings by space shaping femtosecond laser

doi: 10.11884/HPLPB202436.240081

Zhao Changdong^{1, 4
,},
Liu Yonggang⁵,
Wei Wenqing^{3, 4},
Zhang Hang²,
Deng Hu^{3, 4},
Liu Quancheng^{3, 4},
Hu Jianbo^{2
,
,},
Shang Liping³,
Li Zhanfeng^{1
,
,}

1.
School of Manufacturing Science and Engineering, Southwest University of Science and Technology, Mianyang 621010, China
2.
Key Laboratory of Shock Wave Physics and Detonation Physics, Institute of Fluid Physics, CAEP, Mianyang 621900, China
3.
School of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, China
4.
Tianfu Institute of Research and Innovation, Southwest University of Science and Technology, Chengdu 610299, China
5.
State Key Laboratory of Environment-friendly Energy Materials, Southwest University of Science and Technology, Mianyang 621010, China

Received Date: 2024-03-07
Accepted Date: 2024-04-29
Rev Recd Date: 2024-05-11

Available Online: 2024-06-05

Publish Date: 2024-07-04

Abstract

Abstract

Aiming at the difficulty of fabricating large-area nanograting structures with femtosecond laser in one step, the direct writing method of femtosecond laser pulse using slit-spatial shaping is proposed in this paper. By conducting a study on the parameter dependence of nanograting structures on the single-crystal silicon surface with the processing system, the optimized conditions of incident shaping femtosecond laser—energy density of 8.00 μJ/cm², scanning speed of 9 mm/s, and slit width of 0.40 mm—are obtained. By using SEM, AFM and other microscopic characterization methods, it is indicated that the fabricated nanograting structure has an extremely high width (41.20 μm), greatly improving the fabrication efficiency of large-area nanograting structures in one step. This study provides a certain reference for the current research on efficiency optimizing and performance enhancing of femtosecond laser direct writing systems.
- femtosecond laser direct writing,
- spatial shaping,
- nanograting structures,
- length-width ratio

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References(22)

References

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