Effect of Cr2O3 coating sintered at high temperature on the vacuum surface hold-off voltage performance of Al2O3 ceramic

Yang Jie; Chen Xin; Li Chen; Zhang Xiaoning; He Jialong; Liu Ping; Qin Zhen; Zhao Wei; Huang Gang; Xiang Jun; Li Tiantao; Li Jie; Dong Pan; Wang Tao

doi:10.11884/HPLPB202537.240275

Volume 37 Issue 4

Mar. 2025

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Yang Jie, Chen Xin, Li Chen, et al. Effect of Cr2O3 coating sintered at high temperature on the vacuum surface hold-off voltage performance of Al2O3 ceramic[J]. High Power Laser and Particle Beams, 2025, 37: 055003. doi: 10.11884/HPLPB202537.240275

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Yang Jie, Chen Xin, Li Chen, et al. Effect of Cr₂O₃coating sintered at high temperature on the vacuum surface hold-off voltage performance of Al₂O₃ ceramic[J]. High Power Laser and Particle Beams, 2025, 37: 055003. doi: 10.11884/HPLPB202537.240275

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Effect of Cr₂O₃coating sintered at high temperature on the vacuum surface hold-off voltage performance of Al₂O₃ ceramic

doi: 10.11884/HPLPB202537.240275

1.
Institute of Fluid Physics, CAEP, Mianyang 621900, China
2.
Department of Radiotherapy, Sichuan Clinical Research Center for Cancer, Sichuan Cancer Hospital & Institute, SichuanCancer Center, University of Electronic Science and Technology of China, Chengdu 610041, China

Received Date: 2024-08-26
Accepted Date: 2025-03-07
Rev Recd Date: 2025-03-07

Available Online: 2025-03-17

Publish Date: 2025-04-15

Abstract

Abstract

In this study, Cr₂O₃ was applied to the surface of Al₂O₃ ceramic via a dip-coating method. Subsequently, the final coated ceramic was obtained through high-temperature sintering. The effects of the Cr₂O₃ coating on material composition, microstructure, secondary electron emission coefficient, surface resistivity, and vacuum surface hold-off voltage performance were systematically investigated. The results indicate that the surface of the coated ceramic appears dark red, representing a mixture of three materials: Al₂O₃-Cr₂O₃ solid solution, MgAl₂O₄, and Cr₂O₃. Compared to the Al₂O₃ ceramic, both the grain size and pore size on the surface are reduced, and the homogeneity of the grain size is significantly enhanced. After high-temperature sintering, Al and Cr diffuse into each other. Additionally, a small amount of glass phase, likely migrating from the ceramic substrate, is detected in the coating. Owing to the high-temperature sintering of the Cr₂O₃ coating, the secondary electron emission coefficient is reduced to 3.22, and the surface resistivity is also lowered to 4.52×10¹¹ Ω. Furthermore, the vacuum surface hold-off electric field strength of the coated ceramic increases to 34.44 kV/cm, which is approximately 108% higher than that of the Al₂O₃ ceramic.
- Al₂O₃ ceramic,
- Cr₂O₃ coating,
- high temperature sintering,
- vacuum surface hold-off voltage performance

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