Influence of actuator position deviation on low-frequency phase fitting capability of deformable mirror

By using the least square method, the phase fitting effects of deformable mirror are investigated with different actuator position deviations, and arrangements, coupling coefficients and numbers of actuators. The results show that, for the random low frequency phase, the anti-disturbance ability of the deformable mirror with square arrangement of actuators is better than that with triangle arrangement, and the ability can be improved by increasing the coupling coefficient and the number of actuators.