Soft X-ray KBA microscope resolution and its influencing factors

The paper investigates the resolution of soft X-ray KBA microscope and analyzes its influencing factors, including diffractive effect, geometrical aberration, slope error and surface roughness of specula. A calculation model of the KBA microscope is obtained according to these analyses. A 2.5 keV X-ray imaging experiment is performed and the resolution agrees with the simulated data of the model in large visual field. The incompleteness of this model is also analyzed.