zhang xin-yu, tang qing-le, zhang zhi, et al. DNA microarray plate in quartz glass substrate fabricated by ion beam etching[J]. High Power Laser and Particle Beams, 2002, 14.
Citation:
zhang xin-yu, tang qing-le, zhang zhi, et al. DNA microarray plate in quartz glass substrate fabricated by ion beam etching[J]. High Power Laser and Particle Beams, 2002, 14.
zhang xin-yu, tang qing-le, zhang zhi, et al. DNA microarray plate in quartz glass substrate fabricated by ion beam etching[J]. High Power Laser and Particle Beams, 2002, 14.
Citation:
zhang xin-yu, tang qing-le, zhang zhi, et al. DNA microarray plate in quartz glass substrate fabricated by ion beam etching[J]. High Power Laser and Particle Beams, 2002, 14.
The DNA microarray plates in quartz glass substrates are fabricated using a multiple-process, including photolithography, heat treatment, and ion beam etching. Both the scanning electron microscope and surface style measurement are carried out to determine the dimension and the surface morphology of the devices. The reason of the shape distortion of DNA microarray plate in quartz glass substrate is analyzed. The coupling method of the quartz glass plate and the DNA sample is discussed. The techniques utilized can be applied to fabricate the DNA microarray plate of larger.
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