In this work the electron state of Cu and Au clusters obtained by plused laser deposition on surface of Ni, Mo, C and NaCl(100) was studied by X-ray photoelectron spectroscopy(XPS); The initial and final state contributions of electron binding energy were separated by combination of XPS peak Cu2p3/2 and Cu L3M4,5M4,5 Auger transition, their relationship with Cu surface atomic concentration was obtained and the explanation was given. XPS, RBS and TEM were used to study the growth of Au clusters on the surface of NaCl(100), average height and surface coverage of Au clusters at different surface atomic concentration were obtained by calculations.