A series of HfO2/SiO 2 high reflective multilayers whose reflectiv ity are more than 99.5% at wavelength 1064nm are coated by three deposition methods. respectitely, and it is found that the method of the reactive electronic beam evaporation of hafnia got the multilayer samples with the hightest laser induced damage threshold 60J/cm2 for 1064nm, 5ns.