Perdeuterated polystyrene (DPS) was used as the raw material. By emulsifying microencapsulation technique, high quality DPS hollow microspheres for inertial confinement fusion (ICF) with diameter from 150 to 450 μm, wall thickness from 2 to 15 μm were fabricated. The sphericity, concentricity and surface roughness were ≥99.5%, 95%~98% and ＜30nm respectively. This paper describes the fabrication process, and the main factors that influence the quality of the microspheres were studied also．