In the Inertial Confinement Fusion(ICF) system, rigorous requirements of target illumination are requested, such as top flat, steep edge, low sidelobes and high light efficiency. Binary optical element(BOE) is a very important approach to realize the above requirements. A hybrid algorithm, GLUSA(Global/local united search algorithm), was developed for designing phases of the BOE. The simulated results showed that BOE arrays applied can decrease the sensitivity of the input phase and amplitude distortion. A 16phaselevel BOE was manufactured by a pattern generator, photolothography and ionetching sequentially. Based on the optical Computerized Tomography(CT), a measurement system for twodimensional intensity distribution has been set up. Experiment results declare that the focal spo