Volume 13 Issue 01
Feb.  2001
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ma ping, chai lin, qiu fu-ming, et al. Influence of preparation process on laser induced damage threshold of hafnia films[J]. High Power Laser and Particle Beams, 2001, 13.
Citation: ma ping, chai lin, qiu fu-ming, et al. Influence of preparation process on laser induced damage threshold of hafnia films[J]. High Power Laser and Particle Beams, 2001, 13.

Influence of preparation process on laser induced damage threshold of hafnia films

  • Publish Date: 2001-02-15
  • A series of films were prepared by reactive evaporation. The microstructure defects on film surfaces and effect of substrate cleaning procedures on laser induced damage threshold were investigated. The RMS surface roughness of uncoated and coated substrates were measured. It was shown that the coating process could increase or decrease the surface roughness and had obvious effects on damage threshold.
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