Volume 09 Issue 02
May  1997
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  • Publish Date: 1997-05-15
  • We have constructed and tested a glow discharge chamber with a clear aperture of 300mm 300mm . By using the 揵uttons?cathode and the automatic preionization cathode, we have got uniform glow discharge in large area. We have measured delay time of the glow discharge and the plasma resistance under various conditions. So the optimal conditions forming uniform glow discharge in large area were discovered.
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    通讯作者: 陈斌, bchen63@163.com
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      沈阳化工大学材料科学与工程学院 沈阳 110142

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