Discharge characteristics of slope and plane surface discharge radiation sources

Two surface discharge radiation sources with slope structure and plane structure respectively are introduced. The discharge characteristics of these two sources were studied with 1.0 μF and 1.5 μF storage capacitance and 15~30 kV charging voltage. From the experiment, some conclusions are drawn: the discharge resistance and inductance increase with the increase of the electrode distance of the slope structure, the discharge circuit area becomes larger; the discharge current and deposition power of the slope structure source are smaller than those of the plane structure source while the deposition efficiency is larger under the same charging voltage and capacitance; the use of 1.5 μF capacitor can enhance the deposition efficiency of the same source and it matches the discharge circuit e