Influence of bounce mode on surface roughness of CH coating on microshells

The CH coating on microshells was fabricated by low-pressure plasma chemical vapor deposition (LPPCVD) with a bounce pan system. The influence of bounce modes on the surface topography of the CH coating was discussed. The surface topography was probed by optical microscopy and scanning electron microscopy(SEM). Roughness and sphericity were measured with an atomic force microscopy(AFM). X-radiography was used to obtain the concentricity. The results show that the surface topography of the coating is improved significantly by the intermittent bounce mode, and the roughness of medium high mode is reduced. The surface finish is improved ulteriorly by the intermittent bounce mode as the duty ratio is reduced. The RMS roughness of 30 mm CH coating is less than 30 nm. The spericity and concentri