DESIGN OF THE CONDENSER FOR SOFT X RAY NORMAL INCIDENCE MICROSOPIC OPTICS

wang zhanshan; cao jianlin; chen xingdan

Volume 10 Issue 01

Jan. 1998

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wang zhanshan, cao jianlin, chen xingdan. DESIGN OF THE CONDENSER FOR SOFT X RAY NORMAL INCIDENCE MICROSOPIC OPTICS[J]. High Power Laser and Particle Beams, 1998, 10.

Citation:

wang zhanshan, cao jianlin, chen xingdan. DESIGN OF THE CONDENSER FOR SOFT X RAY NORMAL INCIDENCE MICROSOPIC OPTICS[J]. High Power Laser and Particle Beams, 1998, 10.

wang zhanshan, cao jianlin, chen xingdan. DESIGN OF THE CONDENSER FOR SOFT X RAY NORMAL INCIDENCE MICROSOPIC OPTICS[J]. High Power Laser and Particle Beams, 1998, 10.

Citation:

wang zhanshan, cao jianlin, chen xingdan. DESIGN OF THE CONDENSER FOR SOFT X RAY NORMAL INCIDENCE MICROSOPIC OPTICS[J]. High Power Laser and Particle Beams, 1998, 10.

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DESIGN OF THE CONDENSER FOR SOFT X RAY NORMAL INCIDENCE MICROSOPIC OPTICS

1.
The State Key Laboratory of Applied Optics;Institute of Optics and Fine Mechanics Chinese Academy of Science Changchun 130022;

Publish Date: 1998-01-15

Abstract

Abstract

The optimum choice of grazing incidence on the basis of the demands soft X ray normal incidence microscopic optics is presented. The methods determined the elliptical condenser was carried out according to analyzing the geometric parameters of condenser. The structure of the condenser for soft X ray normal incidence microscopic optics was completed considering the reflective performance of materials and the techniques of the condenser.
- soft x-ray,
- microscopic optics,
- condenser,
- grazing incidence