yi shengzhen, mu baozhong, wang xin, et al. Imaging characteristic analysis of Kirkpatrick-Baezmicroscope with periodic multilayer[J]. High Power Laser and Particle Beams, 2009, 21.
Citation:
yi shengzhen, mu baozhong, wang xin, et al. Imaging characteristic analysis of Kirkpatrick-Baezmicroscope with periodic multilayer[J]. High Power Laser and Particle Beams, 2009, 21.
yi shengzhen, mu baozhong, wang xin, et al. Imaging characteristic analysis of Kirkpatrick-Baezmicroscope with periodic multilayer[J]. High Power Laser and Particle Beams, 2009, 21.
Citation:
yi shengzhen, mu baozhong, wang xin, et al. Imaging characteristic analysis of Kirkpatrick-Baezmicroscope with periodic multilayer[J]. High Power Laser and Particle Beams, 2009, 21.
Relation between imaging characteristic of Kirkpatrick-Baez(KB) microscope and periodic multilayer films is analyzed. The optical structure of KB microscope is designed based on resolution and collection efficiency requirements. Imaging quality is simulated, and 8 keV X-ray imaging experiment by KB microscope with W/B4C periodic multilayer is performed, the resolution is about 2 μm in central field and better than 5 μm in ±100 μm field. The result comparison between simulation and experiment shows spherical aberration and mirror machining precision are the key factors influencing the resolution of central field, and the range of effective field of view is limited by angle bandwidth of periodic multilayer.
DownLoad: