Detection of multi-layer interface structure

The single-layer SiO2, single-layer ZrO2, ZrO2/SiO2/ZrO2 three-layer thin films were deposited on K9 glass by sol-gel spin-coating method. The colloidal suspension of ZrO2 was prepared by Zr(OPr)4 and that of SiO2 was prepared by TEOS. An ellipsometer was used to measure the thickness and refractive index of the films, and a UV-Vis spectrophotometer was used to measure the transmittance of the films. By the TFCalc thin film design software, the transmittance of the films was simulated. The vertical section of the ZrO2/SiO2/ZrO2 three-layer film was probed by scanning electron microscopy, X-ray photoelectron spectroscopy(XPS) was used to measure the variation of compositi