wang yanru, li bincheng, liu mingqiang. Measurement of thermal deformation using surface thermal lens technique[J]. High Power Laser and Particle Beams, 2010, 22.
Citation:
wang yanru, li bincheng, liu mingqiang. Measurement of thermal deformation using surface thermal lens technique[J]. High Power Laser and Particle Beams, 2010, 22.
wang yanru, li bincheng, liu mingqiang. Measurement of thermal deformation using surface thermal lens technique[J]. High Power Laser and Particle Beams, 2010, 22.
Citation:
wang yanru, li bincheng, liu mingqiang. Measurement of thermal deformation using surface thermal lens technique[J]. High Power Laser and Particle Beams, 2010, 22.
A theoretical model to describe the three-dimensional deformation distribution of an optical sample irradiated by a square-wave modulated laser is presented. The surface thermal lens(STL) signal is defined based on the deformation theory simultaneously. According to STL theory, the deformation of a highly reflective sample with BK7 substrate is measured experimentally. The results are in good agreement with deformation model. With our experiment configuration, a minimal 1.985 nm direct current (DC) deformation is measured, corresponding to 3.97 nm without modulation. The 10 pm detect limit for the deformation measurement is achieved in our experiment. The AC STL signal is also presented in the frequency domain.
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