Volume 15 Issue 03
Mar.  2003
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yu li, yi ai-ping, liu jing-ru, et al. Study on deposition efficiency of sectioned surface discharge[J]. High Power Laser and Particle Beams, 2003, 15.
Citation: yu li, yi ai-ping, liu jing-ru, et al. Study on deposition efficiency of sectioned surface discharge[J]. High Power Laser and Particle Beams, 2003, 15.

Study on deposition efficiency of sectioned surface discharge

  • Publish Date: 2003-03-15
  • Taking advantage of a module of impacted sectioned surface discharge source, the changes of resistance, inductance and energy deposition efficiency of the circuit under various experimental parameters including charging voltage, capacitance and gas pressure have been studied. The framing photographs of discharge plasma channel under different conditions have been obtained. The effect of the discharge plasma movement on energy deposition efficiency has been analyzed and the measures for improving the deposition efficiency have been given.
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      沈阳化工大学材料科学与工程学院 沈阳 110142

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