wang zhan-shan, zhang zhong, wang feng-li, et al. Fabrication of the multilayer beam splitters with large area for soft Xray laser interferometer[J]. High Power Laser and Particle Beams, 2004, 16.
Citation:
wang zhan-shan, zhang zhong, wang feng-li, et al. Fabrication of the multilayer beam splitters with large area for soft Xray laser interferometer[J]. High Power Laser and Particle Beams, 2004, 16.
wang zhan-shan, zhang zhong, wang feng-li, et al. Fabrication of the multilayer beam splitters with large area for soft Xray laser interferometer[J]. High Power Laser and Particle Beams, 2004, 16.
Citation:
wang zhan-shan, zhang zhong, wang feng-li, et al. Fabrication of the multilayer beam splitters with large area for soft Xray laser interferometer[J]. High Power Laser and Particle Beams, 2004, 16.
The soft X-ray laser Mach-Zehnder interferometer is an important tool to measure the electron densities of a laser-produced plasma near the critical surface. The design of a multilayer beam splitter at 13.9nm for soft X-ray laser Mach-Zehnder interferometer is completed based on the standard of maximizing product of reflectivity and transmission of the beam splitter. The beam splitters which is Mo/Si multilayers on 10mm×10mm area Si-3N-4 membrane are fabricated using the magnetron sputtering. The figure error of the beam splitter has reached the deep nanometer magnitude by using optical profiler and the product of reflectivity and transmission measured by synchrotron radiation is up to 4%．
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