原子力显微镜加工轨迹测压电剪切叠堆二维高频运动位移

尹若楠; 薛勃; 张津铭; 吴哲

doi:10.11884/HPLPB202436.230351

原子力显微镜加工轨迹测压电剪切叠堆二维高频运动位移

doi: 10.11884/HPLPB202436.230351

东北林业大学机电工程学院，哈尔滨 150040

基金项目: 国家自然科学基金项目(52105434)；中国博士后科学基金项目(2022M710642)；东北林业大学人才引进计划项目(520/60201487)

详细信息

作者简介:
尹若楠，yinruonan1@163.com

通讯作者:
薛　勃，xuebo@nefu.edu.cn。

中图分类号: TN384
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- 文章访问数: 233
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- PDF下载量: 21
- 被引次数: 0
出版历程
- 收稿日期: 2023-10-23
- 修回日期: 2024-05-21
- 录用日期: 2024-12-03
- 网络出版日期: 2024-05-29
- 刊出日期: 2024-07-04

Measurement of two-dimensional high-frequency motion displacement of piezoelectric shear stack using atomic force microscope tapping trajectories

College of Mechanical and Electrical Engineering, Northeast Forestry University, Harbin 150040, China

摘要

摘要: 针对两轴压电剪切叠堆在高频电压驱动下的二维高频运动的位移测量问题，提出使用（AFM）探针在敲击模式下的加工痕迹测量压电剪切叠堆运动位移的方法，首先制备热塑性聚合物聚甲基丙烯酸甲酯（PMMA）薄膜，随后进行AFM探针敲击加工实验，扫描AMF探针加工轨迹并对其进行后处理，成功得到压电剪切叠堆的二维高频运动位移，实现了以半接触的方式对压电剪切叠堆二维高频复杂运动的准确检测，并依据实验数据对压电剪切叠堆二维运动位移随电压幅值及频率的变化情况进行分析。实验结果表明，在10 Hz～5 kHz的激励信号频率范围内，所提出的方法能准确测量压电剪切叠堆的运动位移。
- 原子力显微镜 /
- 敲击加工 /
- 压电剪切叠堆 /
- 二维高频运动
Abstract: Aiming at the displacement measurement problem of two-dimensional high-frequency motion of two-axis piezoelectric shear stacks driven by high-frequency voltage, a method for measuring the displacement of piezoelectric shear stacks by using the machining trajectories of atomic force microscope (AFM) probe in tapping mode was proposed. Firstly, the thermoplastic polymer polymethyl methacrylate (PMMA) film was prepared, and then the AFM probe tapping experiment was carried out. By scanning the processing trajectory of the AFM probe and post-processing it, the two-dimensional high-frequency motion displacement of the piezoelectric shear stack was successfully obtained. Accurate detection of two-dimensional high-frequency complex motion of piezoelectric shear stacks in a semi-contact manner is realized. Based on the experimental data, the variation of the two-dimensional motion displacement of the piezoelectric shear stack with the voltage amplitude and frequency is analyzed.
- atomic force microscope /
- tapping /
- piezoelectric shear stack /
- two-dimensional high-frequency motion

HTML全文

图 1 压电剪切叠堆驱动的实验装置示意图

Figure 1. Schematic diagram of the experimental device driven by piezoelectric shear stack

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图 2 AFM扫描敲击加工纳米沟槽二维、三维形貌及其横截面

Figure 2. Two-dimensional, three-dimensional morphology and cross section of nanogrooves processed by AFM scanning tapping

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图 3 0.4 V/0.4 V，0.6 V/0.6 V，0.8 V/0.8 V，100 Hz/500 Hz/1500 Hz下纳米沟槽三维形貌图

Figure 3. Three-dimensional topography of nanogrooves at 0.4 V/0.4 V, 0.6 V/0.6 V, 0.8 V/0.8 V, 100 Hz/500 Hz /1 500 Hz

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图 4 后处理流程图

Figure 4. Post-processing flowchart

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图 5 0.4 V/0.4 V, 0.6 V/0.6 V, 0.8 V/0.8 V, 100 Hz/500 Hz/1 500 Hz情况下轨迹投影及其拟合圆周

Figure 5. Trajectory projection and its fitting circle under the condition of 0.4 V/0.4 V, 0.6 V/0.6 V, 0.8 V/0.8 V, 100 Hz/500 Hz/1 500 Hz

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图 6 0.4 V/0.8V, 10 Hz/200 Hz/600 Hz/1 000 Hz下轨迹投影及其拟合圆周

Figure 6. Trajectory projection and its fitting circle under 0.4 V/0.8V, 10 Hz/200 Hz/600 Hz/1 000 Hz

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图 7 轨迹半径随电压及频率的变化情况

Figure 7. Change of trajectory radius with voltage and frequency

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图 8 轨迹半径在高频率下的变化情况及高频率情况下的轨迹形貌

Figure 8. Change of trajectory radius at high frequency and the trajectory morphology at high frequency

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表 1 驱动电压信号数值

Table 1. Driving voltage signal parameters

voltage/V	frequency/Hz
0.4/0.4, 0.6/0.6, 0.8/0.8	10, 100, 200, 500, 800, 1000, 1500, 2000
0.4/0.8	10, 100, 200, 500, 800, 1000
0.4/0.4	2500, 3000, 3500, 4000, 4500, 5000, 5500, 6000, 6500, 7000, 7500, 8000

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