涂层中的玻璃相对氧化铝陶瓷真空绝缘性能的影响

Effect of glass phase in coatings on the vacuum insulation performance of alumina ceramics

  • 摘要: Al2O3陶瓷在电真空器件中常被用来作为绝缘部件,但在高电压加载下,其表面由于电荷积累容易产生沿面闪络现象,严重降低了整个器件的绝缘性能,影响器件的正常运行,因此,提升Al2O3陶瓷的真空绝缘性能具有十分重要的意义。本研究在Al2O3陶瓷表面制备了Cr2O3基涂层,并系统性地研究了涂层中的玻璃相对涂层陶瓷相结构、表面形貌、二次电子发射系数、表面电阻率和真空绝缘性能的影响。结果表明:陶瓷基体中的Al元素在高温下会向涂层中进行迁移。随着玻璃相含量的提高,涂层中的Cr2O3相含量逐渐降低直至完全消失,使其全部与陶瓷基体反应形成Al2-xCrxO3 (0<x<2)、Mg(Al2-yCry)O4 (0<y<2)及少量的ZnAl2O4和(Na,Ca)Al(Si,Al)3O8。涂层可以提高陶瓷表面晶粒均匀性和致密度,但玻璃相含量的变化对其微观形貌影响较小。Cr2O3涂层可以降低Al2O3陶瓷的二次电子发射系数和表面电阻率,这使得所有配方涂层陶瓷的真空绝缘性能均优于Al2O3陶瓷。随着涂层中玻璃相含量的增大,涂层陶瓷的二次电子发射系数和表面电阻率也逐渐增大。当玻璃相质量分数为20%时,涂层陶瓷绝缘性能最佳,其真空沿面耐压强度达到119.63 kV/cm。

     

    Abstract:
    Background Alumina (Al2O3) ceramics are extensively employed as insulating components in vacuum electronic devices. However, under high voltage, charge accumulation on their surface can easily lead to surface flashover, which severely degrades the insulation performance of the device and affects its operation. Therefore, enhancing the vacuum surface insulation performance of Al2O3 ceramics holds significant academic value and practical implications. Surface coating represents a widely adopted strategy for enhancing the insulation performance of Al2O3 ceramics. Nevertheless, the specific influence of the glass phase within the coating on the insulating properties remains largely unexplored.
    Purpose The present work is dedicated to exploring how the glass phase in coatings affects the vacuum insulation performance of Al2O3 ceramics.
    Methods A Cr2O3-based coating was fabricated on the surface of Al2O3 ceramics, and the effects of the glass phase within the coating on phase structure, surface morphology, secondary electron emission coefficient (SEE), surface resistivity, and vacuum insulation performance of the coated ceramics were systematically investigated.
    Results The results indicate that Al from the substrate diffuses into the coating under high-temperature firing. The content of Cr2O3 phase in the coating exhibits a gradual decrease and eventually disappears with the rise of the glass phase content, causing it to fully react with the ceramic substrate to form Al2-xCrxO3 (0<x<2)、Mg(Al2-yCry)O4 (0<y<2), along with small amounts of ZnAl2O4 and (Na,Ca)Al(Si,Al)3O8. The coating improves the surface grain homogeneity and the density of the ceramic surface, although variations in the glass phase content have a negligible effect on its microstructure. Additionally, the Cr2O3 coating reduces both the SEE coefficient and the surface resistivity of the Al2O3 ceramic. However, as the glass phase content in the coating increases, both the SEE coefficient and surface resistivity of the coated ceramics exhibit a gradual upward trend. The optimal insulation performance is achieved when the glass phase content reaches 20%. At this point, the vacuum surface hold-off strength attains 119.63 kV/cm.
    Conclusions Modulation of the glass phase content in the surface coating enables the tunability of the vacuum surface insulation performance of the Al2O3 ceramics, with the performance improvement stemming from the decreased SEE coefficient and the appropriate surface resistivity.

     

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