10 kV等离子体表面改性高压脉冲电源
10 kV high voltage pulse power supply for plasma surface modification
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摘要: 研制的10 kV高压脉冲电源采用脉冲单元叠加技术，将12组相互独立的各脉冲单元模块串联起来，采用同步驱动技术，实现了10 kV的高压脉冲输出。可通过增减脉冲单元的数量,满足不同输出电压的需要,实现了模块化设计。该电源的性能指标为:脉冲电压幅值0.1~10.0 kV,脉冲频率0.2~2.0 kHz,脉冲占空比5%~30% ,脉冲电流幅值20 A,脉冲功率200 kW。试验结果表明：在等离子体负载条件下电源运行稳定、可靠。Abstract: The series connected circuit structure with synchronous drive technology, which is composed of 12 relatively independent pulse power supplies, is used in order to acquire 10 kV high voltage pulse. The design is modularized and different voltage output can be realized through varying the number of pulse power units. The output parameters of the power supply are as follows: the peak voltage 0.1~10.0 kV, the pulse frequency 0.2~2.0 kHz, the duty cycle 5%~30%, the pulse current magnitude 20 A, and the pulse power 200 kW. Experiments have demonstrated that the power supply is stable and reliable in plasma surface modification processes.
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Key words:
- plasma surface modification /
- high voltage pulse power supplies /
- pulse module /
- series
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