百焦耳KrF激光器腔体的设计和激光实验
DESIGN OF HUNDRED JOULE KrF EXCIMER LASER CAVITY AND LASER EXPERIMENT
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Abstract: An one hundred joule KrF excimer laser was built in our institute in 1990. The maximum of output energy reaches 106 joules. This paper introduces the selection of the main structure parameters of the laser cavity and laser experiments.
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Key words:
- high pumping rate /
- excimer laser
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