STUDY ON THE CHARACTERISTICS OF ELECTRICAL DISCHARGE AND OUTPUT PERFORMANCE OF A HIGH-POWER KrF LASER
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摘要: 介绍了一台工作于振荡器状态下的高功率放电泵浦KrF准分子激光器的放电工作特性,研究了影响激光输出参量的若干因素。通过计算和实验,在国内首次实现了体积大于85cm×3cm×1.3cm的KrF激光气体放电,单脉冲激光输出能量超过130mJ,给出了详细的实验结果并深入讨论分析了有关的物理机制。Abstract: This paper describes the electrical discharge characteristics in the optical cavity of a high-power KrF excimer laser amplifer operating as an oscilator. Several factors in connection with the output of laser energy have been studied. For the first time in China we successfully achieved a large volume(85cm × 3cm × 1.3cm) uniform KrF discharge with more than 130mJ laser output energy for a single pulse. In addition, detailed experimental results are presented here and further discussion and analysis on the related physical mechanism are presented.
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Key words:
- KrF excimer laser /
- discharge pumped laser /
- electrical discharge in gases
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