Abstract: Aluminium attenuation foil with various thickness was fabricated by different methods, and the mass thickness and thickness homogeneity of the foil were measured by a computerized α mass thickness measurement apparatus. The surface chemical component and depth distribution in the foil were analysed by using Auger Electron Spectroscopy (AES). The chemical components of oxide layer were renealed by Al K.LL Auger characteristic peak and the change of oxide layer thickness with storage time were measured, Also, the upper limit of other impurity contents of the foil were discussed.