离子辅助沉积氧化物薄膜的光学特性
OPTICAL PROPERTIES OF OXIDE COATINGS PREPARED BY ION ASSISTED DEPOSITION
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Abstract: Effects of ion energy, ion current intensity and ion species on refractive indices, optical absorptance and laser- induced damage thresholds of TiO2, ZrO2, SiO2 coatings deposited using ion assisted deposition were investigated.
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Key words:
- coating /
- ion assisted deposition /
- optical property
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