溶胶-凝胶双层三波长增透膜制备

Preparation of sol-gel three-wavelength antireflective film

摘要: 通过理论模拟与实验相结合，研究了以双层膜的方式实现三波长增透的途径。以正硅酸乙酯为前驱体，采用酸催化与碱催化溶胶混合的方式调控了溶胶折射率，并配制了双层复合膜所用的两种溶胶，制备出了351 nm处透过率大于99.5%，527 nm透过率大于98%，1053 nm透过率大于98%的三波长增透膜。用扫描电镜、原子力显微镜观测了膜层结构，用椭偏仪和分光光度计对膜层性能进行了表征。三波长增透膜对高功率激光装置的运行性能提升起到了积极的促进作用。

Abstract: Based on simulation and experiment, the way to get three-wavelength antireflective film was researched, A synthesis procedure of SiO2 colloid derived from acid-alkali 2-step catalyzed hydrolysis was disclosed. Two sols were compounded and the three-wavelength antireflective films with transmittances of 351 nm, 527 nm and 1053 nm by over 99.5%, 98% and 98%, were prepared. The properties of the coatings were characterized with TEM, AFM, spectroscopic ellipsometry and spectrophotometer. Three-wavelength antireflective coating on the running performance of high power laser device lifting played a positive role in promoting.