超高分辨极紫外光谱仪研制和性能测试

陈勇; 杨雷; 卢峰; 王少义; 杨祖华; 范全平; 魏来

doi:10.11884/HPLPB202638.250393

超高分辨极紫外光谱仪研制和性能测试

doi: 10.11884/HPLPB202638.250393

中国工程物理研究院激光聚变研究中心等离子体物理全国重点实验室，四川绵阳 621900

基金项目: 国家磁约束核聚变能发展研究专项(2022YFE03200200)，等离子体物理重点实验室基金项目(6142A04240302)

详细信息

作者简介:
陈　勇，hanhaipaopao@163.com

中图分类号: O434.12;O433.4
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- 文章访问数: 18
- HTML全文浏览量: 11
- PDF下载量: 1
- 被引次数: 0
出版历程
- 收稿日期: 2025-11-03
- 修回日期: 2025-12-24
- 录用日期: 2025-12-08
- 网络出版日期: 2026-01-07

Development and performance test of a high resolution extreme ultraviolet spectroscopy system

National Key Laboratory of Plasma Physics, Laser Fusion Research Center, CAEP, Mianyang 621900, China

摘要

摘要: 针对磁约束聚变氦杂质谱线的高精度现场检测需求，研制了一套超高分辨极紫外光谱系统。该光谱仪采用掠入射Czerny-Turner型结构，通过可调入射狭缝调节光通量与光谱分辨。基于像差理论，对系统的光谱分辨率进行了计算分析。利用自研的光学设计软件开展了光线追迹仿真，仿真结果表明其光谱分辨优于20 000。利用微波等离子体光源进行了波长标定与性能测试，实验结果表明光谱仪在He II（30.3786 nm）处光谱分辨为0.001 4 nm，满足激光诱导极紫外光谱的高精度分析要求。
- 极紫外 /
- 光谱仪 /
- 光栅 /
- 光谱分辨率 /
- 激光诱导击穿光谱
Abstract: Background
The retention and diffusion of helium on the surface of the first wall is one of the key problems in the study of magnetic confinement fusion. And laser-induced breakdown spectroscopy is the most promising technique for in-situ diagnosis of the first wall. Compared with the optical spectral range, laser-induced extreme ultraviolet spectra has more advantages in sensitivity, noise suppression and accuracy.
Purpose
In order to meet the requirement of high precision on-site measurement of helium impurity lines in magnetic confinement fusion, a ultra-high resolution EUV spectroscopy system was developed.
Methods
The grazing incidence Czerny-Turner structure is used in the spectrometer, and the luminous flux and spectral resolution are adjusted through an adjustable incidence slit. The ray tracing simulation is carried out with a self-developed optical design software. And the wavelength calibration and performance testing are carried out by microwave plasma light source.
Results
The simulation results show that the spectral resolution is better than 20 000, and the experimental results indicate that the spectrometer achieves a spectral resolution of 0.001 4 nm at He II (30.3786 nm).
Conclusions
The spectrometer can meet the requirement of high-precision measurement of helium extreme ultraviolet spectral lines, and it is expected to provide an important theoretical support for the research on the helium retention and diffusion in the first wall.
- extreme ultraviolet /
- spectrometer /
- grating /
- spectral resolution /
- laser-induced breakdown spectroscopy

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图 1 超高分辨光谱仪光路原理图

Figure 1. Optical scheme of extreme ultraviolet spectroscopy

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图 2 光谱分辨率计算结果

Figure 2. Spectral resolution calculation results

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图 3 光谱仪在不同波长处的仿真结果

Figure 3. Simulated results at different wavelength

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图 4 光谱仪设计结构图

Figure 4. Design structure diagram of the extreme ultraviolet spectroscopy

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图 5 极紫外光谱仪光谱分辨测试结果

Figure 5. Results of the extreme ultraviolet spectroscopy resolution

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表 1 微波等离子体光源氦特征谱线

Table 1. He spectral line of microwave plasma light sourc

No.	photon energy/eV	wavelength/nm	energy level transition
1	21.218 0	58.433 4	He I：1s2p (¹P₁⁰) →1s²(¹S₀)
2	23.087 0	53.703 0	He I：1s3p (¹P₁⁰) →1s²(¹S₀)
3	23.742 1	52.221 3	He I：1s4p (¹P₁⁰) →1s²(¹S₀)
4	40.813 0	30.378 6	He II：2p (²P_1/2⁰) →1s(²S_1/2) 2p (²P_3/2⁰) →1s(²S_1/2)
5	48.371 4	25.631 7	He II：3p (²P_1/2⁰) →1s(²S_1/2) 3p (²P_3/2⁰) →1s(²S_1/2)
6	51.016 6	24.302 7	He II：4p (²P_1/2⁰) →1s(²S_1/2) 4p (²P_3/2⁰) →1s(²S_1/2)
7	52.241 0	23.733 1	He II：5p (²P_1/2⁰) →1s(²S_1/2) 5p (²P_3/2⁰) →1s(²S_1/2)

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参考文献(21)

[1]	Chen Jiale, Jia Guozhang, Xiang Nong. Recent progress in modeling of CFETR plasma profiles from core to edge[J]. Journal of Fusion Energy, 2021, 40: 1. doi: 10.1007/s10894-021-00292-7
[2]	Philipps V, Malaquias A, Hakola A, et al. Development of laser-based techniques for in situ characterization of the first wall in ITER and future fusion devices[J]. Nuclear Fusion, 2013, 53: 093002. doi: 10.1088/0029-5515/53/9/093002
[3]	Zhao Dongye, Li Cong, Hu Zhenhua, et al. Remote in situ laser-induced breakdown spectroscopic approach for diagnosis of the plasma facing components on experimental advanced superconducting tokamak[J]. Review of Scientific Instruments, 2018, 89: 073501. doi: 10.1063/1.5024848
[4]	Wu Ding, Sun Liying, Liu Jiamin, et al. Parameter optimization of the spectral emission of laser-induced tungsten plasma for tokamak wall diagnosis at different pressures[J]. Journal of Analytical Atomic Spectrometry, 2021, 36(6): 1159-1169. doi: 10.1039/D1JA00009H
[5]	郭连波, 牛雪晨, 张猛胜, 等. 激光诱导击穿光谱技术应用研究进展(特邀)[J]. 光子学报, 2023, 52: 0352104 doi: 10.3788/gzxb20235203.0352104 Guo Lianbo, Niu Xuechen, Zhang Mengsheng, et al. Analysis of the application progress in laser-induced breakdown spectroscopy: a review (invited)[J]. Acta Photonica Sinica, 2023, 52: 0352104 doi: 10.3788/gzxb20235203.0352104
[6]	李祥友, 刘可, 周冉, 等. 激光诱导击穿光谱技术及应用综述[J]. 中国激光, 2022, 49: 1202003 doi: 10.3788/CJL202249.1202003 Li Xiangyou, Liu Ke, Zhou Ran, et al. Laser-induced breakdown spectroscopy and its application[J]. Chinese Journal of Lasers, 2022, 49: 1202003 doi: 10.3788/CJL202249.1202003
[7]	Zhao Dongye, Farid N, Hai Ran, et al. Diagnostics of first wall materials in a magnetically confined fusion device by polarization-resolved laser-induced breakdown spectroscopy[J]. Plasma Science and Technology, 2014, 16(2): 149-154. doi: 10.1088/1009-0630/16/2/11
[8]	Zhao Dongye, Li Cong, Wang Yong, et al. Temporal and spatial dynamics of optical emission from laser ablation of the first wall materials of fusion device[J]. Plasma Science and Technology, 2018, 20: 014022. doi: 10.1088/2058-6272/aa96a0
[9]	姚胤旭, 邱荣, 万情, 等. 基于激光诱导击穿光谱的基体效应[J]. 强激光与粒子束, 2023, 35: 111004 doi: 10.11884/HPLPB202335.230126 Yao Yinxu, Qiu Rong, Wan Qing, et al. Matrix effect based on laser-induced breakdown spectroscopy[J]. High Power Laser and Particle Beams, 2023, 35: 111004 doi: 10.11884/HPLPB202335.230126
[10]	Bleiner D, Qu Di, Kraft K, et al. Laser-induced XUV spectroscopy (LIXS): from fundamentals to application for high-precision LIBS[J]. Spectrochimica Acta Part B: Atomic Spectroscopy, 2023, 204: 106668. doi: 10.1016/j.sab.2023.106668
[11]	Qu Di, Trottmann M, Wyder C, et al. Dual spectrometer for simultaneous visible and extreme ultraviolet LIBS[C]//Proceedings Volume 11886, International Conference on X-Ray Lasers 2020. 2020: 118860X.
[12]	Garakhin S A, Chkhalo N I, Kas’kov I A, et al. High-resolution laboratory reflectometer for the study of x-ray optical elements in the soft and extreme ultraviolet wavelength ranges[J]. Review of Scientific Instruments, 2020, 91: 063103. doi: 10.1063/1.5144489
[13]	Wünsche M, Fuchs S, Weber T, et al. A high resolution extreme ultraviolet spectrometer system optimized for harmonic spectroscopy and XUV beam analysis[J]. Review of Scientific Instruments, 2019, 90: 023108. doi: 10.1063/1.5054116
[14]	段紫雯, 邢阳光, 彭吉龙, 等. 太阳短波极紫外双波段成像光谱仪设计[J]. 光学学报, 2024, 44: 1223001 doi: 10.3788/AOS231371 Duan Ziwen, Xing Yangguang, Peng Jilong, et al. Design for solar short extreme ultraviolet dual-waveband imaging spectrometer[J]. Acta Optica Sinica, 2024, 44: 1223001 doi: 10.3788/AOS231371
[15]	张雨佳, 梁贵云. 天体高分辨率软X射线光谱的实验测量标定[J]. 天文研究与技术, 2021, 18(3): 362-371 doi: 10.14005/j.cnki.issn1672-7673.20201112.002 Zhang Yujia, Liang Guiyun. Experimental measurement and calibration of celestial bodies with high resolution soft X-ray radiation[J]. Astronomical Research & Technology, 2021, 18(3): 362-371 doi: 10.14005/j.cnki.issn1672-7673.20201112.002
[16]	杜学维, 沈永才, 李朝阳, 等. 极紫外平场光栅光谱仪的研制和性能测试[J]. 光谱学与光谱分析, 2012, 32(8): 2270-2274 doi: 10.3964/j.issn.1000-0593(2012)08-2270-05 Du Xuewei, Shen Yongcai, Li Chaoyang, et al. EUV flat field grating spectrometer and performance measurement[J]. Spectroscopy and Spectral Analysis, 2012, 32(8): 2270-2274 doi: 10.3964/j.issn.1000-0593(2012)08-2270-05
[17]	Jark W. A high-efficiency and high-spectral-resolution EUV/soft X-ray monochromator based on off-plane diffraction[J]. Journal of Synchrotron Radiation, 2020, 27(1): 25-30. doi: 10.1107/S1600577519014462
[18]	Li Chaoyang, Wei Shen, Du Xuewei, et al. On-line spectral diagnostic system for Dalian coherent light source[J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2015, 783: 65-67. doi: 10.1016/j.nima.2015.01.089
[19]	Yang Zhicheng, Zhang Ximing, Geng Heping, et al. Development and commissioning of a broadband online X-ray spectrometer for the SXFEL Facility[J]. Journal of Synchrotron Radiation, 2024, 31(5): 1373-1381. doi: 10.1107/S1600577524005812
[20]	李明, 吴介立, 吴永前, 等. X射线反射镜研制技术的现状和发展[J]. 光电工程, 2020, 47: 200205 doi: 10.12086/oee.2020.200205 Li Ming, Wu Jieli, Wu Yongqian, et al. A review on the fabrication technology of X-ray reflector[J]. Opto-Electronic Engineering, 2020, 47: 200205 doi: 10.12086/oee.2020.200205
[21]	杨祖华, 周维民, 李鹏飞, 等. 光学设计软件X-LAB及其工程化应用[J]. 强激光与粒子束, 2018, 30: 112002 doi: 10.11884/HPLPB201830.180207 Yang Zuhua, Zhou Weimin, Li Pengfei, et al. Optical simulation software X-LAB and its applications[J]. High Power Laser and Particle Beams, 2018, 30: 112002 doi: 10.11884/HPLPB201830.180207