级联型高压重复频率微秒脉冲源的研制

李志军; 张雅雯; 高迎慧; 韩静

doi:10.11884/HPLPB201931.190040

级联型高压重复频率微秒脉冲源的研制

doi: 10.11884/HPLPB201931.190040

李志军^1,,
张雅雯^{1, 2, ,},
高迎慧²,
韩静²

1.
河北工业大学人工智能与数据科学学院, 天津 300130
2.
中国科学院电工研究所, 北京 100190

基金项目:

河北省科技支撑计划项目 15212105D

详细信息

作者简介:
李志军(1964—), 男, 博士, 正高级工程师, 从事可再生能源转换与控制技术及电力电子应用技术研究, zhijun_li@263.net

通讯作者:
张雅雯(1993—), 女, 从事高压电源及电力电子应用技术研究, zhangyawen93@maili.ee.ac.cn

中图分类号: TM89
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- 被引次数: 0
出版历程
- 收稿日期: 2019-02-21
- 修回日期: 2019-04-29
- 刊出日期: 2019-08-15

Development of cascade high voltage repetitive frequency microsecond pulse power supply

Li Zhijun^1
,,
Zhang Yawen^{1, 2
, ,},
Gao Yinghui²,
Han Jing²

1.
School of Artificial Intelligence, Hebei University of Technology, Tianjin 300130, China
2.
Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China

摘要

摘要: 针对等离子体的应用，基于级联型电压叠加技术研制了一种最高输出电压为20 kV的高压微秒脉冲源，该电源由40个相同的电源模块组成，其单个模块电压等级为500 V，降低了对器件的绝缘耐压要求。电源的输出电压值在0~20 kV之间可调；重复频率在0~10 kHz之间、脉宽在0~30 μs之间可调；该电源的上升沿和下降沿均在1 μs以内。模块化的设计提高了电源的冗余容错能力。将该电源作为产生等离子体的激励源时，其输出的高压脉冲波形稳定，且根据负载对输出高压波形的要求不同，该电源可以方便地进行调节。
- 脉冲功率 /
- 重复频率 /
- 级联型脉冲源 /
- 等离子体 /
- 间接光触发
Abstract: In this paper, a cascade high voltage microsecond pulse power supply with output voltage of 20 kV is developed. The voltage level of a single module is 500 V, which reduces the insulation withstand high voltage requirements of the device. The output voltage value range of this pulse power supply is 0-20 kV; the repetition frequency is adjustable between 0-10 kHz; the pulse width is adjustable between 0-30 μs; the output current value is between 0-15 A; the rising and falling edge of the power supply are all within 1μs. Modular design improves the redundancy fault tolerance of this power supply and reduces its failure rate. When this power source is used as an excitation source for plasma production, and the output high voltage pulse waveform is stable, the power supply can be conveniently adjusted according to different load. When the voltage and frequency change, the mode of the discharge is different.
- pulse power /
- repetitive frequency /
- cascade power supply /
- plasma /
- indirect light trigger

HTML全文

图 1 主电路结构

Figure 1. Main circuit structure

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图 2 控制电路

Figure 2. Control circuit

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图 3 主电路仿真模块

Figure 3. High voltage output waveform

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图 4 高压输出波形

Figure 4. High voltage output waveform

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图 5 电阻负载时输出波形

Figure 5. Output waveform when resistive load

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图 6 放电装置

Figure 6. Discharge device

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图 7 不同频率时输出波形

Figure 7. Output waveform at different frequencies

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图 8 不同参数时电压输出波形

Figure 8. Discharge phenomenon under different parameters

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表 1 仿真参数

Table 1. Simulation parameters

input voltage/V	filter capacitance/μF	switching frequency/kHz	pulse width/μs	resistance/kΩ
360	47	1	10	2

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