Patterning of graphene by light field modulated nanosecond laser

Li Yanglong; Wu Lingyuan; Shen Huanhuan; Liu Guodong; Wang Weiping

doi:10.11884/HPLPB201830.180154

Volume 30 Issue 12

Dec. 2018

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Li Yanglong, Wu Lingyuan, Shen Huanhuan, et al. Patterning of graphene by light field modulated nanosecond laser[J]. High Power Laser and Particle Beams, 2018, 30: 129001. doi: 10.11884/HPLPB201830.180154

Citation:

Li Yanglong, Wu Lingyuan, Shen Huanhuan, et al. Patterning of graphene by light field modulated nanosecond laser[J]. High Power Laser and Particle Beams, 2018, 30: 129001. doi: 10.11884/HPLPB201830.180154

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Patterning of graphene by light field modulated nanosecond laser

doi: 10.11884/HPLPB201830.180154

Li Yanglong^{1, 2
,},
Wu Lingyuan^{1, 2
,
,},
Shen Huanhuan^{1, 2},
Liu Guodong^{1, 2},
Wang Weiping^{1, 2}

1.
Institute of Fluid Physics, CAEP, Mianyang 621900, China
2.
Key Laboratory of Science and Technology in High Energy Laser, China Academy of Engineering Physics, Mianyang 621900, China

Received Date: 2018-06-01
Rev Recd Date: 2018-11-12
Publish Date: 2018-12-15

Abstract

Abstract

Laser-based approaches for graphene synthesis, reduction, modification, cutting and micro-patterning have been developed and applied to the fabrication of various electronic devices.General method utilized in direct laser writing and patterning of graphene was realized by controlling the movement of the sample or the laser reflecting mirror, while patterning by single shot laser is rarely reported.In the present study, a single shot laser patterning graphene method via light field modulating is proposed.Via controlling the light field by special light modulator (SLM), nanosecond laser pulses focused by objective lens were modulated to the desired pattern.The 4layer graphene in the laser irradiate region was damaged when laser energy was lager than 0.03 mJ.When the laser energy reached 0.06 mJ, clear pattern formed in graphene while no damage occurred in silicon base.The characteristics of graphene patterns were measured using Raman spectra imaging technology.The experimental results revealed that the light field modulated nanosecond laser remains potentially advantageous in graphene micro pattern processing with no need of moving the sample, quick processing and micrometer precision.
- graphene,
- laser,
- Raman spectra,
- laser processing,
- patterning

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References(21)

References

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