Measurement of two-dimensional high-frequency motion displacement of piezoelectric shear stack using atomic force microscope tapping trajectories

Yin Ruonan; Xue Bo; Zhang Jinming; Wu Zhe

doi:10.11884/HPLPB202436.230351

Volume 36 Issue 8

Jul. 2024

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Yin Ruonan, Xue Bo, Zhang Jinming, et al. Measurement of two-dimensional high-frequency motion displacement of piezoelectric shear stack using atomic force microscope tapping trajectories[J]. High Power Laser and Particle Beams, 2024, 36: 089003. doi: 10.11884/HPLPB202436.230351

Citation:

Yin Ruonan, Xue Bo, Zhang Jinming, et al. Measurement of two-dimensional high-frequency motion displacement of piezoelectric shear stack using atomic force microscope tapping trajectories[J]. High Power Laser and Particle Beams, 2024, 36: 089003. doi: 10.11884/HPLPB202436.230351

Citation:

Yin Ruonan, Xue Bo, Zhang Jinming, et al. Measurement of two-dimensional high-frequency motion displacement of piezoelectric shear stack using atomic force microscope tapping trajectories[J]. High Power Laser and Particle Beams, 2024, 36: 089003. doi: 10.11884/HPLPB202436.230351

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Measurement of two-dimensional high-frequency motion displacement of piezoelectric shear stack using atomic force microscope tapping trajectories

doi: 10.11884/HPLPB202436.230351

College of Mechanical and Electrical Engineering, Northeast Forestry University, Harbin 150040, China

Received Date: 2023-10-23
Accepted Date: 2024-12-03
Rev Recd Date: 2024-05-21

Available Online: 2024-05-29

Publish Date: 2024-07-04

Abstract

Abstract

Aiming at the displacement measurement problem of two-dimensional high-frequency motion of two-axis piezoelectric shear stacks driven by high-frequency voltage, a method for measuring the displacement of piezoelectric shear stacks by using the machining trajectories of atomic force microscope (AFM) probe in tapping mode was proposed. Firstly, the thermoplastic polymer polymethyl methacrylate (PMMA) film was prepared, and then the AFM probe tapping experiment was carried out. By scanning the processing trajectory of the AFM probe and post-processing it, the two-dimensional high-frequency motion displacement of the piezoelectric shear stack was successfully obtained. Accurate detection of two-dimensional high-frequency complex motion of piezoelectric shear stacks in a semi-contact manner is realized. Based on the experimental data, the variation of the two-dimensional motion displacement of the piezoelectric shear stack with the voltage amplitude and frequency is analyzed.
- atomic force microscope,
- tapping,
- piezoelectric shear stack,
- two-dimensional high-frequency motion

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References(14)

References

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