Volume 37 Issue 2
Feb.  2025
Turn off MathJax
Article Contents
Qiu Yiwu, Dong Lei, Yin Yanan, et al. High-energy proton irradiation effect of Cascode structure GaN HEMT device[J]. High Power Laser and Particle Beams, 2025, 37: 024003. doi: 10.11884/HPLPB202537.240223
Citation: Qiu Yiwu, Dong Lei, Yin Yanan, et al. High-energy proton irradiation effect of Cascode structure GaN HEMT device[J]. High Power Laser and Particle Beams, 2025, 37: 024003. doi: 10.11884/HPLPB202537.240223

High-energy proton irradiation effect of Cascode structure GaN HEMT device

doi: 10.11884/HPLPB202537.240223
  • Received Date: 2024-07-09
  • Accepted Date: 2024-10-06
  • Rev Recd Date: 2024-09-04
  • Available Online: 2024-11-26
  • Publish Date: 2025-02-15
  • Due to the comprehensive performance advantages, GaN-based power devices are more suitable for the future development needs of RF power amplifier modules in the space equipment such as satellite electronic systems.Therefore, the degradation of electrical characteristics and damage mechanism of the enhancement-mode Cascode structure GaN HEMT devices were studied by irradiation experiments with 5 MeV, 60 MeV and 300 MeV protons at the irradiation dose of 2×1012~1×1014 cm−2. The experimental results show that when the irradiation dose is 2×1012 cm−2, the threshold voltage of the Cascode structure GaN HEMT device is significantly reduced, the transconductance peak is negatively drifted and the peak transconductance is reduced, the saturated drain current is significantly increased, and the gate leakage current has no significant change. When the irradiation dose reaches 1×1013 cm−2, the degradation of electrical properties is inhibited and tends to saturate. It is concluded that the cascaded silicon MOSFET in the Cascode structure GaN HEMT is the internal cause of threshold voltage negative drift and drain current increase after proton irradiation. Combined with low-frequency noise test analysis, it is found that the higher the proton irradiation dose, the larger the noise power spectral density of the device, indicating that the more defects introduced by irradiation, the more serious the irradiation damage. Compared with the results of 60 MeV and 300 MeV proton irradiation, the degradation of electrical characteristics of the device after 5 MeV proton irradiation is the most serious. SRIM simulation results show that the lower the proton irradiation energy, the greater the number of vacancies (gallium vacancy is dominated), and the more significant the degradation of electrical characteristics of the device.
  • loading
  • [1]
    Hu Xinwen, Karmarkar A P, Jun B, et al. Proton-irradiation effects on AlGaN/AlN/GaN high electron mobility transistors[J]. IEEE Transactions on Nuclear Science, 2003, 50(6): 1791-1796. doi: 10.1109/TNS.2003.820792
    [2]
    Carbone M, Hirche K, Morand S, et al. An overview of GaN FET technology, reliability, radiation and market for future space application[C]//2019 European Space Power Conference (ESPC). 2019: 1-4.
    [3]
    沈自才. 空间辐射环境工程[M]. 北京: 中国宇航出版社, 2013

    Shen Zicai. Space radiation environmental engineering[M]. Beijing: China Aerospace Press, 2013
    [4]
    Kim D S, Lee J H, Yeo S, et al. Proton irradiation effects on AlGaN/GaN HEMTs with different isolation methods[J]. IEEE Transactions on Nuclear Science, 2018, 65(1): 579-582. doi: 10.1109/TNS.2017.2780273
    [5]
    Xapsos M A, O’Neill P M, O’Brien T P. Near-earth space radiation models[J]. IEEE Transactions on Nuclear Science, 2013, 60(3): 1691-1705. doi: 10.1109/TNS.2012.2225846
    [6]
    Kim H Y, Kim J, Liu Lu, et al. Effects of proton irradiation energies on degradation of AlGaN/GaN high electron mobility transistors[J]. Journal of Vacuum Science & Technology B, 2012, 30: 012202.
    [7]
    Wan Xin, Baker O K, McCurdy M W, et al. Low energy proton irradiation effects on commercial enhancement mode GaN HEMTs[J]. IEEE Transactions on Nuclear Science, 2017, 64(1): 253-257. doi: 10.1109/TNS.2016.2621065
    [8]
    Chen Ziwen, Yue Shaozhong, Wang Jinbin, et al. Proton-induced effect on AlGaN/GaN HEMTs after hydrogen treatment[J]. IEEE Transactions on Device and Materials Reliability, 2021, 21(3): 297-302. doi: 10.1109/TDMR.2021.3090337
    [9]
    Koehler A D, Anderson T J, Tadjer M J, et al. Impact of surface passivation on the dynamic on-resistance of proton-irradiated AlGaN/GaN HEMTs[J]. IEEE Electron Device Letters, 2016, 37(5): 545-548. doi: 10.1109/LED.2016.2537050
    [10]
    Liu Lu, Hwang Y H, Xi Yuyin, et al. Study on the effects of proton irradiation on the dc characteristics of AlGaN/GaN high electron mobility transistors with source field plate[J]. Journal of Vacuum Science & Technology B, 2014, 32: 022202.
    [11]
    Kim H Y, Lo C F, Liu L, et al. Proton-irradiated InAlN/GaN high electron mobility transistors at 5, 10, and 15 MeV energies[J]. Applied Physics Letters, 2012, 100: 012107. doi: 10.1063/1.3673906
    [12]
    Hwang Y H, Li Shun, Hsieh Y L, et al. Effect of proton irradiation on AlGaN/GaN high electron mobility transistor off-state drain breakdown voltage[J]. Applied Physics Letters, 2014, 104: 082106. doi: 10.1063/1.4866858
    [13]
    刘峻, 季启政, 杨铭, 等. 质子辐照对AlGaN/GaN HEMT亚阈值摆幅特性的影响[J]. 半导体技术, 2023, 48(2):110-116

    Liu Jun, Ji Qizheng, Yang Ming, et al. Influence of proton irradiation on subthreshold swing characteristics of AlGaN/GaN HEMTs[J]. Semiconductor Materials and Devices, 2023, 48(2): 110-116
    [14]
    Keum D M, Sung H K, Kim H. Degradation characteristics of normally-off p-AlGaN gate AlGaN/GaN HEMTs with 5 MeV proton irradiation[J]. IEEE Transactions on Nuclear Science, 2017, 64(1): 258-262. doi: 10.1109/TNS.2016.2612227
    [15]
    白如雪, 郭红霞, 张鸿, 等. 增强型Cascode结构氮化镓功率器件的高能质子辐射效应研究[J]. 物理学报, 2023, 72:012401 doi: 10.7498/aps.72.20221617

    Bai Ruxue, Guo Hongxia, Zhang Hong, et al. High-energy proton radiation effect of gallium nitride power device with enhanced Cascode structure[J]. Acta Physica Sinica, 2023, 72: 012401 doi: 10.7498/aps.72.20221617
    [16]
    Faruk M G, Wilkins R, Dwivedi R C, et al. Proton and neutron radiation effects studies of MOSFET transistors for potential deep-space mission applications[C]//2012 IEEE Aerospace Conference. 2012: 1-13.
    [17]
    Seehra S S, Slusark W J. The Effect of operating conditions on the radiation resistance of VDMOS power FETs[J]. IEEE Transactions on Nuclear Science, 1982, 29(6): 1559-1563. doi: 10.1109/TNS.1982.4336404
    [18]
    Wu Hao, Fu Xiaojun, Luo Jun, et al. Total ionizing dose effects on the threshold voltage of GaN Cascode devices[J]. Micromachines, 2023, 14: 1832. doi: 10.3390/mi14101832
    [19]
    姜利来. AlGaN/GaN高迁移率晶体管质子辐照效应计算模拟研究[D]. 上海: 华东师范大学, 2023: 32-38

    Jiang Lilai. Computational simulation of proton irradiation effect in AlGaN/GaN high mobility transistors[D]. Shanghai: East China Normal University, 2023: 32-38
    [20]
    Ahn S, Dong Chen, Zhu Weidi, et al. Effect of proton irradiation energy on AlGaN/GaN metal-oxide semiconductor high electron mobility transistors[J]. Journal of Vacuum Science & Technology B, 2015, 33: 051208.
  • 加载中

Catalog

    通讯作者: 陈斌, bchen63@163.com
    • 1. 

      沈阳化工大学材料科学与工程学院 沈阳 110142

    1. 本站搜索
    2. 百度学术搜索
    3. 万方数据库搜索
    4. CNKI搜索

    Figures(8)  / Tables(1)

    Article views (772) PDF downloads(48) Cited by()
    Proportional views
    Related

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return