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    Calculus-like analysis method for analyzing bulk acoustic wave force sensors’ sensitivity
    Gao Yang, Zhao Kunli, Zhao Junwu
    2016, 28: 064101. DOI: 10.11884/HPLPB201628.064101
    Abstract PDF
    Rigorous electromagnetic field model based on waveguide method for 3D thick resist lithography simulation
    Wang Yuxin, Zhou Zaifa, Hua Jie, Wang Fei, Xu Huanwen, Huang Qing'an
    2016, 28: 064102. DOI: 10.11884/HPLPB201628.064102
    Abstract PDF
    Feasibility of MEMS vector hydrophone application in submerged buoy system
    Han Jianjun, Zhang Guojun, Zhang Wendong, Guo Jing, Liu Yuan
    2016, 28: 064103. DOI: 10.11884/HPLPB201628.064103
    Abstract PDF
    Integral algorithm design in sliding mode controller of MEMS gyroscope
    Tian Ying, Chen Li, Chen Danhua, Wang Yayun
    2016, 28: 064104. DOI: 10.11884/HPLPB201628.064104
    Abstract PDF
    Novel high-g dual-threshold MEMS inertial switch
    Zhou Zhijian, Nie Weirong, Xi Zhanwen, Wang Xiaofeng, Luo Qiao
    2016, 28: 064105. DOI: 10.11884/HPLPB201628.064105
    Abstract PDF
    Micro-opto-electro-mechanical systems mirror based on electrostatic repulsive circular rotation actuator
    Ma Wenying, Wei Yaohua, Wang Weimin, Wang Qiang
    2016, 28: 064106. DOI: 10.11884/HPLPB201628.064106
    Abstract PDF
    Effect of loading potential variation on direct methanol fuel cell anode performance
    Huang Naibao, Li Wan, Liang Chenghao, Xu Lishuang, Wang Xiaoye, Sun Tianhang, Sun Min
    2016, 28: 064107. DOI: 10.11884/HPLPB201628.064107
    Abstract PDF
    Cooperative multi-physics simulation on self-heating effect of capacitive RF MEMS switch
    Gao Yang, Li Junru
    2016, 28: 064108. DOI: 10.11884/HPLPB201628.064108
    Abstract PDF
    Optimization of silicon etching process using response surface method
    Fu Wenting, Liang Qiao, Cui Kefu, Shi Tianli, Zhang Na, Zheng Dongming, Tang Hui, Sun Haiwei
    2016, 28: 064109. DOI: 10.11884/HPLPB201628.064109
    Abstract PDF
    Development of IFOG assembly quality control system using minitype endoscope
    Liu Haoting, Ma Yuzhou, Wang Wei, Yan Beibei, Shan Lianjie, Yu Wenpeng
    2016, 28: 064110. DOI: 10.11884/HPLPB201628.064110
    Abstract PDF
    Improvement of microfluidic chip mould thickness uniformity by ultrasonic agitation during electroforming process
    Du Liqun, Yang Tong, Zhao Ming, Tao Yousheng, Luo Lei, Wang Lei, Liu Chong
    2016, 28: 064111. DOI: 10.11884/HPLPB201628.064111
    Abstract PDF
    Automatic measurement for pressure resistance of microspheres
    Dai Changsheng, Rong Weibin, Sun Lining
    2016, 28: 064113. DOI: 10.11884/HPLPB201628.064113
    Abstract PDF
    A calibration and compensation method for piezoresistive atmosphere pressure sensor
    Du Lidong, Zhou Xiaoyu, Wei Kejing, Zhao Zhan, Fang Zhen, Sun Xuejin
    2016, 28: 064114. DOI: 10.11884/HPLPB201628.064114
    Abstract PDF
    Multifunction sensor for pressure and acceleration measurements based on nano-polysilicon thin film resistors
    Mu Ailin, Zhao Xiaofeng, Li Baozeng, Wen Dianzhong, Wu Yalin
    2016, 28: 064115. DOI: 10.11884/HPLPB201628.064115
    Abstract PDF
    Enhanced electrochemical performance of laser scribed graphene films incorporating poly(3,4-ethylenedioxythiophene) nanoparticles
    Chen Yan, Xu Jianhua, Yang Yajie, Xu Lu, Mao Xiling, Yang Wenyao, Zhao Yuetao
    2016, 28: 064116. DOI: 10.11884/HPLPB201628.064116
    Abstract PDF
    Investigations of water droplet formation on conical micromanipulation probe at microscale
    Fan Zenghua, Rong Weibin, Wang Lefeng
    2016, 28: 064117. DOI: 10.11884/HPLPB201628.064117
    Abstract PDF
    Impacting dynamics of ultraviolet induced nanoparticle colloid microjet
    Song Xiaozong, Zhou Youxin
    2016, 28: 064118. DOI: 10.11884/HPLPB201628.064118
    Abstract PDF
    Temperature-frequency characteristics of quartz tuning fork for temperature sensing
    Xu Jun, Liu Chunhua, Ma Jing, Li Xin
    2016, 28: 064119. DOI: 10.11884/HPLPB201628.064119
    Abstract PDF
    Encapsulation of nano-silica particles by polystyrene with dispersion polymerization
    Zhang Kai, Ma Yan, Fan Jinghui
    2016, 28: 064120. DOI: 10.11884/HPLPB201628.064120
    Abstract PDF
    Numerical analysis of anchor mode effect in elliptic mode MEMS ring resonator
    Xiong Zhuang, Yang He, Yuan Mingquan
    2016, 28: 064121. DOI: 10.11884/HPLPB201628.064121
    Abstract PDF
    Fabrication of micro packed gas chromatography column for gas analysis
    Ning Zhanwu, Sun Jianhai, Zhang Yanni, Liu Jinhua, Zhu Xiaofeng, Ma Tianjun, Chen Zhenhai
    2016, 28: 064122. DOI: 10.11884/HPLPB201628.064122
    Abstract PDF
    Effects of fabrication error on thermal drift of capacitive micro accelerometer
    Peng Peng, Peng Bei, Zhou Wu, Yu Huijun, Qu Hao, He Xiaoping
    2016, 28: 064123. DOI: 10.11884/HPLPB201628.064123
    Abstract PDF
    Influence of SU-8 removal process on mechanical properties of electrodeposited nickel
    Li Jianhua, Fu Bo, Ou Xiulong
    2016, 28: 064124. DOI: 10.11884/HPLPB201628.064124
    Abstract PDF
    Crosslinked micrometer-sized polystyrene microspheres reference material
    Fan Jinghui, Wu Juying, Ma Yan
    2016, 28: 064125. DOI: 10.11884/HPLPB201628.064125
    Abstract PDF
    Heat transfer performance of microchannels in LTCC substrate
    Hu Duwei, Miao Min, Fang Runiu, Cui Xiaole, Jin Yufeng
    2016, 28: 064126. DOI: 10.11884/HPLPB201628.064126
    Abstract PDF
    Design of high-efficiency scanning grating mirror for near-infrared micro-spectrometer
    Yang Tingyan, Wen Zhiyu, Zhou Ying
    2016, 28: 064127. DOI: 10.11884/HPLPB201628.064127
    Abstract PDF
    Analysis of terahertz wave atmospheric propagation and communication capacity for nanonetwork applications
    Wang Yuwen, Dong Zhiwei, Li Hanyu, Zhou Xun
    2016, 28: 064128. DOI: 10.11884/HPLPB201628.064128
    Abstract PDF
    Design and analysis of giant magnetostrictive material transducer with bow type structure
    Li Dongwei, Yang Zhaoshu, Xue Guangming
    2016, 28: 064129. DOI: 10.11884/HPLPB201628.064129
    Abstract PDF
    A differential resonant pressure micro sensor with identical sensitivity of two resonant beams
    Xing Yonghao, Xie Bo, Chen Jian, Chen Deyong, Wang Junbo
    2016, 28: 064130. DOI: 10.11884/HPLPB201628.064130
    Abstract PDF
    Elastic stopper design for MEMS device under shock environment
    Jiang Tao, Sun Lin, Liu Guangjun
    2016, 28: 064131. DOI: 10.11884/HPLPB201628.064131
    Abstract PDF
    Photoelectrocatalytic digestion of total phosphorous utilizing TiO2 nanotubes fabricated by anodic oxidation
    Hou Jiahong, Tong Jianhua, Bian Chao, Zhang Jiangang, Xia Shanhong
    2016, 28: 064132. DOI: 10.11884/HPLPB201628.064132
    Abstract PDF
    Method for extracting parameters of performance model of thin film bulk acoustic wave resonator
    Cai Xun, Gao Yang, Huang Zhenhua
    2016, 28: 064133. DOI: 10.11884/HPLPB201628.064133
    Abstract PDF
    Influence of ultraviolet irradiation on dielectric properties of polyetherimide film
    Li Lin, Cheng Min, Liu Wenyuan, Ke Changfeng, Duan Li, Fu Hongmei, Guo Pingwen
    2016, 28: 064134. DOI: 10.11884/HPLPB201628.064134
    Abstract PDF
    Fabrication of micro piezoelectric energy harvester using eutectic bonding and polishing technology
    Li Yigui, Yan Ping, Huang Yuan, Sugiyama Susumu
    2016, 28: 064112. DOI: 10.11884/HPLPB201628.064112
    Abstract PDF