Fabrication of Ag nanocluster and adjustment of particle size by plasma vapor deposition

Ag nanoclusters are prepared by plasma gas condensation method, The parameter dependences of Ag nanoclusters are also studied. The particle diameter and size distribution are measured by in-situ quadrupole mass filter and compared with the analysis of transmission electron microscope (TEM). The results show that keeping other parameters fixed, the average size increases gradually with the increase of sputtering current, aggregation zone length and Ar flow rate, respectively. However, it decreases when the Ar gas flow rate is more than 60 mL/min. The addition of He in Ar gas causes the decline of the average size, which can be enhanced by increasing the He flow rate. The sputtering current and Ar flow rate are key parameters affecting the average size of Ag nanoclusters.The TEM results show that average size of Ag nanoclusters is 2, 4 and 6 nm, respectively by adjusting the parameters. It is also indicated that the size and distribution data of Ag nanoclusters by TEM analysis and in situ quadrupole mass spectrometer are consistent.