Vacuum performance of Ti-Zr-V getter films deposited on narrow tubes

Non-evaporable getter films are widely used in particle accelerators. It has become an integral part of many particle accelerators. Ti-Zr-V films were deposited on Si substrates and straight and bent Ag-Cu tubes with an inner diameter of 22 mm by DC magnetron sputtering. After baked at 180 ℃ for 24 h, the ultimate vacuum of the coated tubes reached 9.2×10⁻¹⁰ Pa. The tubes with activated getter films maintained at 9×10⁻⁹ Pa after closing tubes and ion pump valve. The pumping speed and capacity of Ti-Zr-V films were measured by Test Particle Monte Carlo method. The results show that the best CO sticking probability reaches 0.3, with a pumping capacity of 1.2 monolayer.