Study on diffraction performance of SU-8 micron grating

Li Jingpeng; Wang Jue; Zhang Xuefeng; Li Yi; Dai Qin; Cui Jianfeng; Wang Lei; Wu Rina

doi:10.11884/HPLPB202537.240392

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Li Jingpeng, Wang Jue, Zhang Xuefeng, et al. Study on diffraction performance of SU-8 micron grating[J]. High Power Laser and Particle Beams. doi: 10.11884/HPLPB202537.240392

Citation:

Li Jingpeng, Wang Jue, Zhang Xuefeng, et al. Study on diffraction performance of SU-8 micron grating[J]. High Power Laser and Particle Beams. doi: 10.11884/HPLPB202537.240392

Li Jingpeng, Wang Jue, Zhang Xuefeng, et al. Study on diffraction performance of SU-8 micron grating[J]. High Power Laser and Particle Beams. doi: 10.11884/HPLPB202537.240392

Citation:

Li Jingpeng, Wang Jue, Zhang Xuefeng, et al. Study on diffraction performance of SU-8 micron grating[J]. High Power Laser and Particle Beams. doi: 10.11884/HPLPB202537.240392

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Study on diffraction performance of SU-8 micron grating

doi: 10.11884/HPLPB202537.240392

1.
College of Science, Shenyang University of Technology, , Shenyang 110159, China
2.
School of Mechanical Engineering, Shenyang University of Technology, Shenyang 110159, China

Received Date: 2024-11-13
Accepted Date: 2025-03-13
Rev Recd Date: 2025-04-02

Available Online: 2025-04-27

Abstract

Abstract

The influence of grating height on the diffraction efficiency of SU-8 micron gratings was studied.The diffraction efficiency of gratings with heights of 6-8 μm, 12-16 μm, and 6-30 μm was simulated and analyzed using rigorous coupled wave theory. The simulation results show that when the grating height is 6 μm, the 0th order diffraction efficiency is the lowest and the 1st order diffraction efficiency is the highest; At 12 μm, the 0th order diffraction efficiency is the highest and the 1st order diffraction efficiency is the lowest. When the grating height continuously changes from 6-30 μm, the diffraction efficiency varies periodically. SU-8 thin films with different thicknesses were prepared, and 40 μm periodic gratings with different gate heights were fabricated using picosecond laser etching technology. The measurement results show that when the grating height of the 40 μm period grating is 6.83 μm, the -1st order diffraction efficiency is 28.4%, and the 0th order diffraction efficiency is about 14.7%; When the grating height is 13.45 μm , the 0th order diffraction efficiency is 31.46% and the 1st order diffraction efficiency is 12.35%. The magnitude of the 0th and 1st order diffraction efficiencies varies with the grating height period. Theoretical simulation and experimental exploration will provide important references for the preparation of SU-8 micron gratings and the improvement of first-order diffraction efficiency.
- SU-8,
- diffraction grating,
- diffraction efficiency,
- strict coupling theory,
- picosecond processing

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References(19)

References

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