Metalization and sealing technology of quartz vacuum window film

Tang Qing; Liu Luwei; Li Wei; Yu Qiang; Sun Wentong; Wang Kai

doi:10.11884/HPLPB202638.250270

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Tang Qing, Liu Luwei, Li Wei, et al. Metalization and sealing technology of quartz vacuum window film[J]. High Power Laser and Particle Beams. doi: 10.11884/HPLPB202638.250270

Citation:

Tang Qing, Liu Luwei, Li Wei, et al. Metalization and sealing technology of quartz vacuum window film[J]. High Power Laser and Particle Beams. doi: 10.11884/HPLPB202638.250270

Tang Qing, Liu Luwei, Li Wei, et al. Metalization and sealing technology of quartz vacuum window film[J]. High Power Laser and Particle Beams. doi: 10.11884/HPLPB202638.250270

Citation:

Tang Qing, Liu Luwei, Li Wei, et al. Metalization and sealing technology of quartz vacuum window film[J]. High Power Laser and Particle Beams. doi: 10.11884/HPLPB202638.250270

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Metalization and sealing technology of quartz vacuum window film

doi: 10.11884/HPLPB202638.250270

Tang Qing¹,
Liu Luwei^{1, 3
,},
Li Wei^{1
,
,},
Yu Qiang¹,
Sun Wentong¹,
Wang Kai²

1.
School of Integrated Circuits, Anhui Polytechnic University, Wuhu 241000, China
2.
Key Laboratory of Electronic Restriction Technology, School of Electronic Warfare, National University of Defense Technology, Hefei 230037, China
3.
School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China

Received Date: 2025-08-26
Accepted Date: 2025-12-22
Rev Recd Date: 2026-01-04

Available Online: 2026-01-16

Abstract

Abstract

Background
Although quartz exhibits excellent light transmittance, the significant difference in thermal expansion coefficients between quartz and metal sealing materials has long been a critical technical bottleneck, leading to interface stress concentration and vacuum sealing failures in low-leakage quartz windows.
Purpose
This study addresses the urgent demand for ultra-high vacuum precision optical systems by conducting systematic research on sealing technologies for high-performance quartz vacuum windows.
Methods
To overcome this challenge, this paper innovatively proposes using magnetron sputtering technology to sequentially deposit a Ti/Mo/Cu/Ag multilayer film system on the quartz welding surface, creating a gradient functional metallization layer with thermal stress buffering capability that achieves effective surface metallization..
Results
Scanning electron microscopy observations revealed continuous, dense, and structurally uniform film layers.Nanoindentation experiments further demonstrated a bonding strength of approximately 3.83N between the metallized layer and quartz substrate, indicating robust adhesion. Experimental results show that vacuum window components fabricated using this metallization scheme achieve leakage rates below 10⁻¹² mbar·L⁻¹.
Conclusions
This achievement has broad applications in synchrotron radiation, quantum measurement, and space exploration, providing crucial technical support for the development of high-performance vacuum devices.
- quartz glass,
- vacuum brazing,
- magnetron sputtering,
- vacuum window,
- optoelectronic devices

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References(16)

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