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英文作者, et al. Design of a coaxial fast rising edge solid-state Marx generator[J]. High Power Laser and Particle Beams. doi: 10.11884/HPLPB202638.260001
Citation: 英文作者, et al. Design of a coaxial fast rising edge solid-state Marx generator[J]. High Power Laser and Particle Beams. doi: 10.11884/HPLPB202638.260001

Design of a coaxial fast rising edge solid-state Marx generator

doi: 10.11884/HPLPB202638.260001
  • Received Date: 2026-01-04
  • Accepted Date: 2026-03-17
  • Rev Recd Date: 2026-03-20
  • Available Online: 2026-04-18
  • Background
    With the growing demand for fast-rising high-voltage pulses in industrial, medical, and plasma-related applications, solid-state Marx generators are increasingly used as pulse sources. However, the limited switching performance of semiconductor devices and constraints of circuit topology pose significant challenges for the design of solid-state Marx generators capable of producing very steep rising time.
    Purpose
    This study investigates the factors that determine the rise time of solid-state Marx generators and, on this basis, develops a generator that meets the performance requirements for fast-rising pulses.
    Methods
    A discharge-circuit model of a semiconductor-switched solid-state Marx generator was established, and simulations of parasitic elements were carried out in LTspice to identify their influence on the pulse rise time. In addition, the characteristic impedance of a coaxial output structure was incorporated into the simulations. Guided by these results, a solid-state Marx generator using dual parallel switching paths and a coaxial output structure was designed.
    Results
    Simulation results indicate that the series parasitic inductance of the circuit, the gate-drive resistance, and the Miller capacitance of the switches have the greatest impact on the rise time. By selecting appropriate MOSFETs and choosing a coaxial inner conductor with a characteristic impedance of 177.4 Ω for a 200 Ω load, a coaxial solid-state Marx generator was realized that delivers 10 kV/50 A pulses with a measured rise time of 7.6 ns.
    Conclusions
    Based on this analysis and design, a high-performance high-voltage pulse generator has been developed. The results provide a useful reference for further shortening the rise time of solid-state Marx generators, broadening their application range, and promoting their use as alternatives to conventional gas-switch Marx generators.
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  • [1]
    曹鹤飞, 孙永卫, 原青云, 等. 航天器背面接地介质材料等离子体充电研究[J]. 强激光与粒子束, 2015, 27: 103204 doi: 10.11884/HPLPB201527.103204

    Cao Hefei, Sun Yongwei, Yuan Qingyun, et al. Research on surface charging of back grounded dielectric material of spacecraft[J]. High Power Laser and Particle Beams, 2015, 27: 103204 doi: 10.11884/HPLPB201527.103204
    [2]
    岑超, 陈新华, 郑树森. 纳秒脉冲电场肿瘤电消融的分子生物学机制[J]. 浙江大学学报(医学版), 2015, 44(6): 678-683

    Cen Chao, Chen Xinhua, Zheng Shusen. Mechanism of ablation with nanosecond pulsed electric field[J]. Journal of Zhejiang University (Medical Sciences), 2015, 44(6): 678-683
    [3]
    吴启翔, 陈永刚, 龚立娇, 等. 纳秒脉冲电场肿瘤消融关键技术研究综述[J]. 中国医疗设备, 2023, 38(5): 36-43 doi: 10.3969/j.issn.1674-1633.2023.05.007

    Wu Qixiang, Chen Yonggang, Gong Lijiao, et al. Review of key techniques for nanosecond pulsed electric field of tumor ablation[J]. China Medical Devices, 2023, 38(5): 36-43 doi: 10.3969/j.issn.1674-1633.2023.05.007
    [4]
    江伟华. 高重复频率脉冲功率技术及其应用: (6)代表性的应用[J]. 强激光与粒子束, 2014, 26: 030201 doi: 10.3788/HPLPB20142603.30201

    Jiang Weihua. Repetition rate pulsed power technology and its applications: (VI) typical applications[J]. High Power Laser and Particle Beams, 2014, 26: 030201 doi: 10.3788/HPLPB20142603.30201
    [5]
    王芝, 韩若愚, 李显东, 等. 水中针-板结构小能量脉冲火花放电特性[J]. 强激光与粒子束, 2022, 34: 095006 doi: 10.11884/HPLPB202234.220022

    Wang Zhi, Han Ruoyu, Li Xiandong, et al. Low-energy pulsed spark discharge characteristics of pin-plate structure in water[J]. High Power Laser and Particle Beams, 2022, 34: 095006 doi: 10.11884/HPLPB202234.220022
    [6]
    孙瑞泽, 陈万军, 刘超, 等. 压控型脉冲功率半导体器件技术及应用[J]. 强激光与粒子束, 2024, 36: 095001 doi: 10.11884/HPLPB202436.240120

    Sun Ruize, Chen Wanjun, Liu Chao, et al. Technology and application of the voltage-controlled pulse power semiconductor devices[J]. High Power Laser and Particle Beams, 2024, 36: 095001 doi: 10.11884/HPLPB202436.240120
    [7]
    马振宏, 刘振, 殷胜勇, 等. 高压纳秒脉冲电场消融黑色素瘤细胞实验研究[J]. 浙江大学学报(工学版), 2021, 55(6): 1168-1174,1198 doi: 10.3785/j.issn.1008-973X.2021.06.018

    Ma Zhenhong, Liu Zhen, Yin Shengyong, et al. Experimental study on melanoma cell ablation by high-voltage nanosecond pulsed electric field[J]. Journal of Zhejiang University (Engineering Science), 2021, 55(6): 1168-1174,1198 doi: 10.3785/j.issn.1008-973X.2021.06.018
    [8]
    姜慧, 邵涛, 车学科, 等. 纳秒脉冲表面放电等离子体影响因素的实验研究[J]. 高电压技术, 2012, 38(7): 1704-1710

    Jiang Hui, Shao Tao, Che Xueke, et al. Experimental study on the factors influencing nanosecond-pulsed surface discharge plasma[J]. High Voltage Engineering, 2012, 38(7): 1704-1710
    [9]
    仇聪颖, 管显涛, 刘振, 等. 纳秒脉冲放电处理有机染料废水的实验研究[J]. 强激光与粒子束, 2020, 32: 025010 doi: 10.11884/HPLPB202032.190390

    Qiu Congying, Guan Xiantao, Liu Zhen, et al. Degradation of organic dyes by nanosecond pulsed discharge plasma[J]. High Power Laser and Particle Beams, 2020, 32: 025010 doi: 10.11884/HPLPB202032.190390
    [10]
    薛浩睿, 高文浩, 袁琪, 等. 纳秒脉冲参数对针-水阴极放电等离子体的影响[J]. 高电压技术, 2025, 51(12): 6094-6103 doi: 10.13336/j.1003-6520.hve.20241924

    Xue Haorui, Gao Wenhao, Yuan Qi, et al. Effect of nanosecond pulse parameters on needle water cathode discharge plasma[J]. High Voltage Engineering, 2025, 51(12): 6094-6103 doi: 10.13336/j.1003-6520.hve.20241924
    [11]
    王永刚, 陶正强, 王琦, 等. 模块化全固态波形可调冲击电压发生器[J]. 强激光与粒子束, 2025, 37: 085001 doi: 10.11884/HPLPB202537.250021

    Wang Yonggang, Tao Zhengqiang, Wang Qi, et al. Modular all-solid-state waveform-adjustable impulse voltage apparatus[J]. High Power Laser and Particle Beams, 2025, 37: 085001 doi: 10.11884/HPLPB202537.250021
    [12]
    徐乐, 江伟华. 基于雪崩三极管的快前沿脉冲功率源研究[J]. 强激光与粒子束, 2016, 28: 015001 doi: 10.11884/HPLPB201628.015001

    Xu Le, Jiang Weihua. Study of fast rising pulsed power generator based on avalanche transistors[J]. High Power Laser and Particle Beams, 2016, 28: 015001 doi: 10.11884/HPLPB201628.015001
    [13]
    赵政, 钟旭, 李征, 等. 基于雪崩三极管的高重频高压纳秒脉冲产生方法综述[J]. 电工技术学报, 2017, 32(8): 33-47,54

    Zhao Zheng, Zhong Xu, Li Zheng, et al. Review on the methods of generating high-repetitive-frequency high-voltage nanosecond pulses based on avalanche transistors[J]. Transactions of China Electrotechnical Society, 2017, 32(8): 33-47,54
    [14]
    张萌. 基于Marx电路的亚纳秒级脉冲源研制[D]. 成都: 电子科技大学, 2020: 21-25

    Zhang Meng. Development of sub-nanosecond pulse source based on Marx circuit[D]. Chengdu: University of Electronic Science and Technology, 2020: 21-25
    [15]
    李东升, 李孜, 王永刚, 等. 具有快前沿的固态Marx电源的研究[J]. 强激光与粒子束, 2024, 36: 025003

    Li Dongsheng, Li Zi, Wang Yonggang, et al. Research on solid state Marx power supply with fast front[J]. High Power Laser and Particle Beams, 2024, 36: 025003
    [16]
    王亿明, 王凌云, 张东东, 等. 具有快前沿的10 kV纳秒级脉冲电源的研制[J]. 强激光与粒子束, 2025, 37: 035001 doi: 10.11884/HPLPB202537.240406

    Wang Yiming, Wang Lingyun, Zhang Dongdong, et al. Development of 10 kV nanosecond pulse power supply with fast leading edge[J]. High Power Laser and Particle Beams, 2025, 37: 035001 doi: 10.11884/HPLPB202537.240406
    [17]
    Bae J S, Kim T H, Son S H, et al. Compact solid-state Marx modulator with fast switching for nanosecond pulse[J]. IEEE Transactions on Power Electronics, 2022, 37(8): 9406-9414. doi: 10.1109/TPEL.2022.3156586
    [18]
    Huiskamp T, van Oorschot J J. Fast pulsed power generation with a solid-state impedance-matched Marx generator: concept, design, and first implementation[J]. IEEE Transactions on Plasma Science, 2019, 47(9): 4350-4360. doi: 10.1109/TPS.2019.2934642
    [19]
    van Oorschot J J, Huiskamp T. Fast and flexible, arbitrary waveform, 20-kV, solid-state, impedance-matched Marx generator[J]. IEEE Transactions on Plasma Science, 2023, 51(2): 560-571. doi: 10.1109/TPS.2023.3235418
    [20]
    Mesyats G A. Pulsed power[M]. Boston, MA: Springer, 2005: 215-218.
    [21]
    Chen H Y, Conn A T. A stretchable inductor with integrated strain sensing and wireless signal transfer[J]. IEEE Sensors Journal, 2020, 20(13): 7384-7391. doi: 10.1109/JSEN.2020.2979076
    [22]
    Lemmon A, Banerjee S, Matocha K, et al. Analysis of packaging impedance on performance of SiC MOSFETs[C]//PCIM Europe 2016; International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management. 2016: 1-8.
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