High-precision multilayer film optics and systems for X-ray diagnostics in laser-driven inertial confinement fusion

Su Zijing; Huang Qiushi; Yi Shengzhen; Zhang Zhe; Sheng Pengfeng; Yu Jun; Zhang Xing; Dong Jiaqin; Qi Runze; Zhang Zhong; Wang Zhanshan

doi:10.11884/HPLPB202638.260019

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Su Zijing, Huang Qiushi, Yi Shengzhen, et al. High-precision multilayer film optics and systems for X-ray diagnostics in laser-driven inertial confinement fusion[J]. High Power Laser and Particle Beams. doi: 10.11884/HPLPB202638.260019

Citation:

Su Zijing, Huang Qiushi, Yi Shengzhen, et al. High-precision multilayer film optics and systems for X-ray diagnostics in laser-driven inertial confinement fusion[J]. High Power Laser and Particle Beams. doi: 10.11884/HPLPB202638.260019

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High-precision multilayer film optics and systems for X-ray diagnostics in laser-driven inertial confinement fusion

doi: 10.11884/HPLPB202638.260019

1.
Shanghai Full-Spectrum High-Performance Optical Thin Film Devices and Application Professional Technical Service Platform, Shanghai Frontiers Science Center of Digital Optics, Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
2.
Laser Fusion Research Center, CAEP, Mianyang 621900, China
3.
Shanghai Institute of Laser Plasma, CAEP, Shanghai 201800, China

Received Date: 2026-01-14
Accepted Date: 2026-03-20
Rev Recd Date: 2026-04-01

Available Online: 2026-04-20

Abstract

Abstract

Backgrounds
Multilayer film optics allow for the accurate characterization of high-energy-density plasmas produced in ICF implosions by capturing critical information—temporal, spatial, and spectral—of X-rays, thereby enabling dynamic monitoring of the target. Such comprehensive diagnostics are essential for validating numerical models and understanding the key physics that ultimately determine implosion performance.
Purpose
To address critical X-ray diagnostic applications in ICF research, this paper presents the design, fabrication, characterization, and implementation of high-performance multilayer film optics and systems capable of achieving imaging resolution better than 5 μm, including three critical components: Kirkpatrick-Baez (KB) mirrors, off-axis aspheric mirrors, and Wolter microscopes.
Methods
Key advancements were achieved in X-ray optics, ranging from multi-channel KB mirrors for dual-mode diagnostics, precision-manufactured off-axis aspheres, and comprehensively engineered Wolter microscopes.
Results
Key achievements include a spatial resolution of sub-5 μm using the multi-channel KB mirror system, an exceptional surface figure of 1.56 nm RMS and roughness <0.3 nm on a 50 mm length off-axis asphere via ion beam figuring, and the successful implementation of a full-process methodology for Wolter microscopes.
Conclusions
Breakthroughs in the high-precision manufacturing of multilayer film optics and systems will provide robust technical support for plasma diagnostics in domestic ICF experiments.
- X-ray diagnostic,
- multilayer film optics,
- KB mirror,
- aspheric mirror,
- Wolter micro-optics

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References(15)

References

[1]	王立锋, 叶文华, 陈竹, 等. 激光聚变内爆流体不稳定性基础问题研究进展[J]. 强激光与粒子束, 2021, 33: 012001 doi: 10.11884/HPLPB202133.200173 Wang Lifeng, Ye Wenhua, Chen Zhu, et al. Review of hydrodynamic instabilities in inertial confinement fusion implosions[J]. High Power Laser and Particle Beams, 2021, 33: 012001 doi: 10.11884/HPLPB202133.200173
[2]	Hurricane O A, Patel P K, Betti R, et al. Physics principles of inertial confinement fusion and U. S. program overview[J]. Reviews of Modern Physics, 2023, 95: 025005. doi: 10.1103/RevModPhys.95.025005
[3]	王峰, 张兴, 理玉龙, 等. 激光惯性约束聚变研究中高时空诊断技术研究进展[J]. 强激光与粒子束, 2020, 32: 112002 doi: 10.11884/HPLPB202032.200136 Wang Feng, Zhang Xing, Li Yulong, et al. Progress in high time- and space-resolving diagnostic technique for laser-driven inertial confinement fusion[J]. High Power Laser and Particle Beams, 2020, 32: 112002 doi: 10.11884/HPLPB202032.200136
[4]	Ahlstrom H G, Coleman L W, Rienecker F, et al. Diagnostics of Shiva Nova high-yield thermonuclear events[J]. Journal of the Optical Society of America, 1978, 68(12): 1731-1741. doi: 10.1364/JOSA.68.001731
[5]	徐捷, 穆宝忠, 陈亮, 等. X射线掠入射显微成像诊断技术研究进展[J]. 强激光与粒子束, 2020, 32: 112001 Xu Jie, Mu Baozhong, Chen Liang, et al. Progress of grazing incidence X-ray micro-imaging diagnosis technology[J]. High Power Laser and Particle Beams, 2020, 32: 112001
[6]	伊圣振, 司昊轩, 黄秋实, 等. 激光惯性约束聚变X射线诊断用多通道Kirkpatrick-Baez成像系统研究进展[J]. 光学学报, 2022, 42: 1134007 doi: 10.3788/AOS202242.1134007 Yi Shengzhen, Si Haoxuan, Huang Qiushi, et al. Research progress of multi-channel Kirkpatrick-Baez microscope for X-ray diagnostics in laser inertial confinement fusion[J]. Acta Optica Sinica, 2022, 42: 1134007 doi: 10.3788/AOS202242.1134007
[7]	忻秋琪, 李亚冉, 陈亮, 等. 四通道球面弯晶成像系统设计及实验研究[J]. 强激光与粒子束, 2019, 31: 052001 Xin Qiuqi, Li Yaran, Chen Liang, et al. Design and experimental research of four-channel spherically bent crystal imaging system[J]. High Power Laser and Particle Beams, 2019, 31: 052001
[8]	雷婧艺, 徐捷, 陈亮, 等. 基于非球面反射镜的高分辨KB显微成像系统设计[J]. 光学仪器, 2020, 42(5): 50-56 Lei Jingyi, Xu Jie, Chen Liang, et al. Design of high resolution KB microscopy system based on aspherical mirror[J]. Optical Instruments, 2020, 42(5): 50-56
[9]	Sugisaki K, Takahashi S J, Yoshidomi Y, et al. Influence of fabrication errors on Wölter mirror imaging performance[J]. Applied Optics, 1998, 37(34): 8057-8066. doi: 10.1364/AO.37.008057
[10]	Champey P R, Kolodziejczak J, Kozioziemski B, et al. Toward the fabrication of a 5-μm-resolution Wolter microscope for the National Ignition Facility (invited)[J]. Review of Scientific Instruments, 2022, 93: 113504. doi: 10.1063/5.0101304
[11]	Yi Shengzhen, Dong Jiaqin, Jiang Li, et al. Simultaneous high-resolution x-ray backlighting and self-emission imaging for laser-produced plasma diagnostics using a two-energy multilayer Kirkpatrick–Baez microscope[J]. Matter and Radiation at Extremes, 2022, 7: 015902. doi: 10.1063/5.0062758
[12]	余俊, 王占山, 黄秋实, 等. 极紫外及X射线波段超光滑反射镜的超精密加工与检测[J]. 光学精密工程, 2022, 30(21): 2688-2697 doi: 10.37188/OPE.20223021.2688 Yu Jun, Wang Zhanshan, Huang Qiushi, et al. Ultra-precision machining and testing of reflector mirrors for extreme ultraviolet and X-ray[J]. Optics and Precision Engineering, 2022, 30(21): 2688-2697 doi: 10.37188/OPE.20223021.2688
[13]	Wu Qiaoyu, Huang Qiushi, Zhang Wenwen, et al. Subaperture moving strategy and related systematic errors in stitching interferometry of X-ray mirrors[J]. Optics Express, 2024, 32(26): 45691-45706. doi: 10.1364/OE.541002
[14]	Zhang Wenwen, Huang Qiushi, Sheng Pengfeng, et al. High-precision reconstruction of second-and high-order reference errors based on sub-aperture stitching interferometry[J]. Measurement Science and Technology, 2025, 36: 045016. doi: 10.1088/1361-6501/adc6a4
[15]	Shen Zhengxiang, Sheng Pengfeng, Liao Yingyu, et al. Line fitting tolerance estimation for Wolter-I microscope[J]. Optical Engineering, 2019, 58: 115101. doi: 10.1117/1.oe.58.11.115101