A 1/4 JKrF LASER WITH SIDE-PREIONIZATION
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Abstract
A discharge-pumped KrF laser is constructed.Preionization holes in the electrode surface are replaced by two raws of pins on the side of the electrode for ultraviolet autopreionlzation, resulting in a considerable improvement of main discharge uniformity and an increase of energy depletion. Laser output ranges from l40mJ to 25OmJ with the energy efficiency of 0.8%, and specific energy of 2.3J/1.In addition,the lifetime of the gas and electrodes is also increased.
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