Uniformity calibration system of electron beam scan with BP ANN

Scan uniformity of electron beam is an important technological index of industrial irradiation LINAC, especially to semi-conductor device, which has pretty high requirements for scan uniformity. Standard triangle wave current generator cannot get good scan uniformity, because the beam shape at the ends of scan region has significant difference compared to that in the middle. Thus, in order to obtain ideal scan uniformity, corrected scan current wave shape has to be adopted. Error back propagation method in artificial neural network is used in the calibration system in this paper. It conquers the change of electron beam shape caused by scan magnetic field and t he change of electron beam position which result in the nonuniformity of electron beam distribution, and the normalized RMS of sc