Research of complex structure of mirror cooled by phase change

A new complex structure of mirror cooled by phase change is presented in this paper. The advantage of silicon mirror and copper mirror was used and the defect of them was avoided simultaneously. Thermal distortion of mirror can be decreased effectively. Experiment of Comparing Mo-Cu complex mirror with Si mirror was done. It is shown that thermal distortion of Mo-Cu complex mirror is about half as much as thermal distortion of silicon mirror．