NUMERICAL SIMULATION OF DISORDER SOFT XRAY MULTILAYER FOR A MAXIMUM INTEGRATED REFLECTIVITY
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Abstract
A random method used for improving light throughput of a soft Xray multilayer mirror has been developed. It is demon strated that layer thickness disorder yields band broadening and increased integrated reflectivity,and achieved 75% increase in integrated reflctivity in the 12.4~20.1nm spectral range with respect to periodic multilayer with its first Bragg peak in the center of that range.
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