Scanning Hartmann inspection apparatus

A scanning Hartmann inspection apparatus has been developed on the basis of the traditional Hartmann test principle. It can inspect large-aperture focusing lenses up to 300 mm in diameter within the full aperture. The apparatus consists of a large-aperture collimator, a scanning Hartmann screen, a focusing lens to be tested, a CCD camera and a computer. The longitudinal aberration and the encircled energy of the aspheric collimating lens of the Fizeau plane interferometer with the effective aperture of 154 mm are measured, and it is tested by a WＹＫＯ interferometer as well. The results obtained from the two above mentioned methods agree well, which proves that the scanning Hartmann inspection apparatus is reliable.