zhang ji-cheng, tang yong-jian, wu wei-dong. Technology and application of electron cyclotron resonance microwave plasmasJ. High Power Laser and Partical Beams, 2002, 14(04).
Citation:
zhang ji-cheng, tang yong-jian, wu wei-dong. Technology and application of electron cyclotron resonance microwave plasmasJ. High Power Laser and Partical Beams, 2002, 14(04).
zhang ji-cheng, tang yong-jian, wu wei-dong. Technology and application of electron cyclotron resonance microwave plasmasJ. High Power Laser and Partical Beams, 2002, 14(04).
Citation:
zhang ji-cheng, tang yong-jian, wu wei-dong. Technology and application of electron cyclotron resonance microwave plasmasJ. High Power Laser and Partical Beams, 2002, 14(04).
Technology and application of electron cyclotron resonance microwave plasmas
In this paper, the basic concepts, reaction equipment, experimental research, theoretical research and present applications of electron cyclotron resonance microwave plasma(ECRMP) are reviewed. At the same time, its development in the future is also discussed.
DownLoad: