Study on pulsed excimer laser deposited films

Pulsed lasers of two different durations (30 ns, 500 fs) are used to deposit Hydrogenfree Diamond Like Carbon (DLC) films over large areas. Analysis of DLC films shows remarkable mechanical, optical, electrical, and chemical properties that are close to those of diamond. By optical emission spectroscopy and ion probe, the effects of plasma characteristic on DLC film are on experimentally studied. Amorphous silicon films deposited by PLD are also experimentally studied．