Variations of valence state, phase-structure and optic properties of VO2 thin films induced by electron irradiation

Vanadium dioxide thin films have been irradiated by electron beam with energy of 1.7MeV and fluence of 1.25×1013/cm2, 1.25×1014/cm2, 1.25×1015/cm2 respectively. Structure and V ion valence of the films have been studied by X-ray diffraction and X-ray photoelectron spectroscopy before and after electron irradiation, and their phase-transition properties have been characterized by optical transmittance analysis methods. The results show that the valence variation of V ion and the changes of XRD patterns of the irradiated samples have been detected, and the optical properties during phase-transition process have been changed obviously by electron irradiation.