The calibration of the system transfer function for large interferometer

The wavefront power spectral density (PSD) is being adopted for specifying the large optical components employed in high power density solid-state laser for inertial confinement fusion (ICF). The phase wavefront detected by the interferometer is digitally processed to create the one dimension wavefront PSD. There’re anamorphic effects for measuring the wavefront’s components with high spatial frequencies. It’s necessary to calibrate the system transfer function of the interferometer. Based on the principle of phase comparing, we have designed and fabricated a 100-mm-diameter standard phase object that contained a step phase. The system transfer functions of the transmitted measuring mode and the reflective measuring mode for the WYKO 24-inch interferometer have been respectively obtaine